Effect of the amplitude of vibrations on the pull-in instability of double-sided actuated microswitch resonators

Beam-type micro/nano-electromechanical systems (MEMS/NEMS) are increasingly used in several branches of engineering and science, i.e. mechanics, chemistry, optics, biology, photonics, electronics, etc. Modeling of the electromechanical stability of NEMS is crucial for the reliable design, fabrication and operation of these devices. Many researchers have investigated the pull-in instability of NEMS devices [1-5]. Although there are many articles focused on modeling the pull-in instability of the conventional NEMS with a simple beam-type electrode [6, 7], few efforts have been made for modeling this phenomenon in less conventional systems such as the U-shaped and double-sided NEMS. In this regard, the present research is devoted to the theoretical study of the electromechanical performance of U-shaped and double-sided cantilever NEMS sensors. The U-shaped configuration consists of two parallel cantilever micro/nano-beams with a rigid plate attached to their free ends. Recently, several studies have investigated the limitations and potential of the U-shaped MEMS/ NEMS as sensors [8], actuators [9], and switches [8-11]. Qian et al. [10] developed a U-shaped nanoelectromechanical switch consisting of a capacitive plate supported by two silicon nanowires. They presented several remarkable advantages of the U-shaped switch such as decreasing the Abstract The U-shaped and double-sided nanostructures are promising for developing miniature angular speed sensors. While the electromechanical instability of conventional beam-type nanostructures has been extensively addressed in the literature, few researchers have investigated this phenomenon in the double-sided and U-shaped sensors. In this regard, the present work demonstrates the effect of the centrifugal force on the pull-in performance of the double-sided and U-shaped sensors fabricated from cylindrical nanowire and operated in the van der Waals (vdW) regime. Based on the modified couple stress theory, the size-dependent constitutive equations of the sensors are derived. The governing equations are solved by two different approaches, i.e. the analytic Duan-Adomian method and the numerical differential quadrature method. The influences of the vdW and centrifugal forces, geometric Communicated by Eduardo Alberto Fancello.

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“…By substituting Eqs. (20) and (21) into (12), the nondimensional governing equation of the U-shaped sensor can be written as…”

Section: U-shaped Structurementioning

confidence: 99%

Effect of the centrifugal force on the electromechanical instability of U-shaped and double-sided sensors made of cylindrical nanowires

Keivani

Gheisari

Kanani

et al. 2016

J Braz. Soc. Mech. Sci. Eng.

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“…The strain energy density based on the CST can be expressed as [42,45]: u = 1 2 " ij " ij + " ij " ij + 2 ij ij + 2 0 ij ij ; (6) where and are the classic Lam e constant and shear modulus, respectively. Moduli and 0 are constants which correspond to the couple stress e ects.…”

Section: Strain Energymentioning

confidence: 99%

“…Khan and Akbarzade employed analytical methods to study the oscillation of a driven double-sided miniature resonator [5]. More useful information about double-sided NEMS can be found in [6,7].…”

Section: Introductionmentioning

confidence: 99%

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

et al. 2017

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Abstract. The present research is devoted to theoretical study of the pull-in performance of double-sided and paddle-type NEMS actuators fabricated from cylindrical nanowire operating in the Casimir regime and in the presence of the centrifugal force. D'Alembert's principle was used to transform the angular velocity into an equivalent static, centrifugal force. Using the couple stress theory, the constitutive equations of the actuators were derived. The equivalent boundary condition technique was applied to obtain the governing equation of the paddle-type actuator. Three distinct approaches, the DuanAdomian Method (DAM), Finite Di erence Method (FDM), and Lumped Parameter Model (LPM), were applied to solve the equation of motion of these two actuators. This study demonstrates the in uence of various parameters, i.e., the Casimir force, geometric characteristics, and the angular speed, on the pull-in performance.

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Modeling and analysis of MEMS disk resonators

Chorsi

2017

Microsyst Technol

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Effect of the amplitude of vibrations on the pull-in instability of double-sided actuated microswitch resonators

Cited by 8 publications

References 28 publications

Effect of the centrifugal force on the electromechanical instability of U-shaped and double-sided sensors made of cylindrical nanowires

Effect of the centrifugal force on the electromechanical instability of U-shaped and double-sided sensors made of cylindrical nanowires

The size-dependent electromechanical instability of double-sided and paddle-type actuators in centrifugal and Casimir force fields

Modeling and analysis of MEMS disk resonators

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