Effect of Temperature on Phase Formation in Thin Bilayer Ni/GaAs Films

Дукаров, С.В.; Petrushenko, S. I.; Miroshnychenko, V. V.; Nevgasimov, O. O.; Sukhov, V. N.

doi:10.1007/978-981-13-6133-3_29

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“…It is possible that NiAs was formed due to the change in the chemical composition of the Ni 3 GaAs ternary phase. One can assume that the ternary phase composition changes during the reaction from Ni 3 GaAs to NiAs as follows: Ni 3 GaAs → Ni 3−x GaAs 1−x + xNiAs [ 31 , 47 , 51 ].…”

Section: Discussionmentioning

confidence: 99%

“…The solid-state reaction between metal films and GaAs substrates has been conducted to achieve intermetallic compounds with good and stable contact [ 28 , 29 , 30 , 31 ]. The solid state reaction between Ni film and GaAs substrate leads to the epitaxial formation of the intermetallic Ni 3 GaAs phase [ 26 , 32 , 33 , 34 , 35 ].…”

Section: Introductionmentioning

confidence: 99%

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Thickness Effect on the Solid-State Reaction of a Ni/GaAs System

et al. 2022

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Ni thin films with different thicknesses were grown on a GaAs substrate using the magnetron sputtering technique followed by in situ X-ray diffraction (XRD) annealing in order to study the solid-state reaction between Ni and GaAs substrate. The thickness dependence on the formation of the intermetallic phases was investigated using in situ and ex situ XRD, pole figures, and atom probe tomography (APT). The results indicate that the 20 nm-thick Ni film exhibits an epitaxial relation with the GaAs substrate, which is (001) Ni//(001) GaAs and [111] Ni//[110] GaAs after deposition. Increasing the film’s thickness results in a change of the Ni film’s texture. This difference has an impact on the formation temperature of Ni3GaAs. This temperature decreases simultaneously with the thickness increase. This is due to the coherent/incoherent nature of the initial Ni/GaAs interface. The Ni3GaAs phase decomposes into the binary and ternary compounds xNiAs and Ni3−xGaAs1−x at about 400 °C. Similarly to Ni3GaAs, the decomposition temperature of the second phase also depends on the initial thickness of the Ni layer.

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Section: Discussionmentioning

confidence: 99%