Effect of tantalum doping on the structural and optical properties of RF magnetron sputtered indium oxide thin films

Krishnan, Rajagopalan; Sreedharan, R. Sreeja; Sudheer, S. K.; Sudarsanakumar, C.; Ganesan, V.; Srinivasan, P. Bala; Pillai, V. P. Mahadevan

doi:10.1016/j.mssp.2015.02.033

Cited by 14 publications

(2 citation statements)

References 45 publications

(46 reference statements)

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“…This shift in the peaks of γ-Mo 2 N cubic phase is already reported by several researchers [27,34]. The estimation of the crystallite size in the films is determined using the Debye Scherrer formula [40].…”

Section: Structural Propertiessupporting

confidence: 74%

Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge

Bouaouina

Besnard

Abaidia

et al. 2018

Surface and Coatings Technology

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is an open access repository that collects the work of Arts et Métiers ParisTech researchers and makes it freely available over the web where possible. A B S T R A C TMolybdenum nitride thin films were deposited on (100) silicon substrates by R.F. magnetron sputtering of a Mo target in a (Ar-N 2 ) gas mixtures. The films were studied by Scanning Electron Microscopy (SEM), Energy Dispersive Spectroscopy (EDS) and X-ray diffraction. The nanomechanical properties have been determined by nanoindentation and Peak-Force Quantitative Nanomechanical Mapping (PF-QNM). The total internal stresses were determined by curvature measurements and the Stoney formula. As thin film composition influences the morphology, the stress state and the mechanical properties, modifications are expected in this study where the nitrogen content is tuned. The film exhibits a polycrystalline structure with preferred orientation along (111) plane. The increase of the nitrogen content in the coating (N/ Mo = 1.1) induces a broadening of the full width at half maximum (FWHM) of the (111) diffraction peak, which is attributed to the presence of smaller crystallites. The residual stress and mechanical properties variation were correlated to the structural transition from γ-Mo 2 N to hexagonal and cubic MoN. The results show a good agreement between the nanomechanical properties obtained by nanoindentation and PF-QNM.

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Section: Structural Propertiessupporting

confidence: 74%

Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge

Bouaouina

Besnard

Abaidia

et al. 2018

Surface and Coatings Technology

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show abstract

“…In 2 O 3 yarıiletken filmleri ısıl buharlaştırma [10], RF magnetron saçtırma [11], pulsed lazer büyütme [12], kimyasal buhar depolama [13], sol-jel döndürerek kaplama [14] ve spray pyrolysis (püskürtme) [3][4][5]15] [38] (3) ifadesinden yararlanılır. Burada A bir sabit, E g malzemenin optik bant aralığı ve üs indis m, izinli direkt için m = 1/2, izinsiz direkt m = 3/2, izinli indirekt m = 2 ve izinsiz indirekt m = 3 değerlerini alabilen bir sabittir.…”

Section: Teknolojikunclassified

Spray Pyrolysis Yöntemiyle Üretilen In2o3 Filmlerinin Yapısal Ve Optik Özellikleri

Turan¹,

Zeybekoğlu²

2017

deufmd

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Özet: Geçirgen iletken oksitlerden biri olan indiyum oksit (In 2 O 3) yarıiletken filmleri spray pyrolysis yöntemiyle 300, 350 ve 400 °C taban sıcaklıklarında cam tabanlar üzerine elde edilmiştir. X-ışını kırınım desenleri incelendiğinde, numunelerin cisim merkezli kübik In 2 O 3 kristal yapısına sahip olduğu ve taban sıcaklığı artışının filmlerin yapısal özelliklerini iyileştirdiği belirlenmiştir. Alan emisyon taramalı elektron mikroskobu görüntülerinden, elde edilen filmlerin yüzeye iyi tutunduğu, homojen bir dağılım sergilediği ve taneli bir yapılanmanın olduğu saptanmıştır. Geçirgenlik ölçümlerinden numunelerin direkt bant geçişine sahip olduğu ve bant aralığı değerlerinin 3,38-3,67 eV aralığında değiştiği belirlenmiştir. Numunelerin kırılma indisi ve sönüm katsayısı dalgaboyunun fonksiyonu olarak yansıma spektrumundan envelope yöntemi yardımıyla incelenmiştir. In 2 O 3 filmlerinin dielektrik sabitleri (n, k, ε 1 ve ε ∞), plazma frekansı ω p ve taşıyıcı yoğunluğu N opt gibi optik parametreleri de belirlenmiştir.

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Effects of annealing temperature on nanomechanical and microstructural properties of Cu-doped In2O3 thin films

Chen

Lee

2017

Appl. Phys. A

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Effect of tantalum doping on the structural and optical properties of RF magnetron sputtered indium oxide thin films

Cited by 14 publications

References 45 publications

Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge

Correlation between mechanical and microstructural properties of molybdenum nitride thin films deposited on silicon by reactive R.F. magnetron discharge

Spray Pyrolysis Yöntemiyle Üretilen In2o3 Filmlerinin Yapısal Ve Optik Özellikleri

Effects of annealing temperature on nanomechanical and microstructural properties of Cu-doped In2O3 thin films

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