“…In addition to modifying the bulk, SHI irradiation has been shown to modify the surface morphology of thin films in a variety of systems. [19,20] The type of irradiation ions, synthesis parameters, stoichiometry, and material type, all play an important role in the material's modification. The SHIs move through the material, their bombardment can create disorder in the form of point defects, cluster defects or a perturbed atomic distribution.…”