2016
DOI: 10.1016/j.colsurfa.2016.02.035
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Effect of surfactant and electrolyte on surface modification of c-plane GaN substrate using chemical mechanical planarization (CMP) process

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Cited by 46 publications
(37 citation statements)
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“…As seen from the adsorption isotherms of SDBS (Fig. ), there are four distinct adsorption stages in the investigated concentration range based on changes in slope, which coincides well with the “Somasundaran–Fuerstenau” isotherm for ionic surfactants adsorbed on oppositely charged surface . At low concentration (Stage I), the SDBS monomers are electrostatically adsorbed onto the positively charged ESM surface with the hydrophobic tails on, leading to the increase in hydrophobicity of the surface.…”
Section: Resultssupporting
confidence: 76%
“…As seen from the adsorption isotherms of SDBS (Fig. ), there are four distinct adsorption stages in the investigated concentration range based on changes in slope, which coincides well with the “Somasundaran–Fuerstenau” isotherm for ionic surfactants adsorbed on oppositely charged surface . At low concentration (Stage I), the SDBS monomers are electrostatically adsorbed onto the positively charged ESM surface with the hydrophobic tails on, leading to the increase in hydrophobicity of the surface.…”
Section: Resultssupporting
confidence: 76%
“…In acid slurries, these contaminants must be removed through the subsequent processes, while in alkaline slurries, selecting an appropriate organic base and a suitable complexing agent could effectively prevent the metal pollution. 104–106 Thus, although the extremely thin metamorphic layer is unfavourable for the polishing rate, it is useful to remove surface crystal materials during CMP.…”
Section: Conventional Etchingmentioning
confidence: 99%
“…Surfactants can also change the surface properties of nanocarriers, such as their morphology, magnetic properties, dispersion, and catalytic performances (Asghar et al 2016;Bhuvnesh Bharti et al 2012;Huang et al 2011;Junfang et al 2018). This modi cation may result in a new structure with new surface activity due to the combination of hydrophilic groups of surfactants and surface groups of nanocarriers.…”
Section: Surface Modi Cation Of Nanocarriers In the Surfactant Systemmentioning
confidence: 99%