Effect of surface structure on crystal-truncation-rod scattering under the Bragg condition

Takahashi, Toshio; Yashiro, Wataru; Takahasi, Masamitu; Kusano, Shuji; Zhang, X. W.; Ando, Masami

doi:10.1103/physrevb.62.3630

Cited by 16 publications

(11 citation statements)

References 20 publications

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“…(3) into eq. (1), we obtain a formula for the modulation of CTR scattering intensity I CTR ðkÞ under the Bragg condition: 24) I CTR ðkÞ / jA CTR j 2 ð6Þ…”

Section: Theoretical Backgroundmentioning

confidence: 99%

“…23) Recently Takahashi et al showed that the modulation of CTR scattering caused by a Bragg reflection is sensitive to surface structures if the CTR scattering intensity is measured at a point far from Bragg points, and also showed that the modulation can be related to the phases of the scattering amplitudes of the surface layer. 24) It should be noted that this phenomenon also occurs in noncoplanar cases. 19,25) The phase retrieval method proposed in the previous paper 21) is an application of the phenomenon to the special case where all nonspecular reflections from the surface layers can be neglected.…”

Section: Introductionmentioning

confidence: 96%

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A Phase Retrieval Method for Noncrystalline Layers on Crystal Surfaces

Yashiro

Sumitani

Yoda

et al. 2003

Jpn. J. Appl. Phys.

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A phase retrieval method for noncrystalline surface layers that involves intensity modulation of the specular reflection under the excitation of a Bragg reflection was applied to a Si(001) single crystal covered with a native oxide layer of a few nanometers thickness. The phases and moduli of the amplitudes of the scatterings from the native oxide layer were uniquely retrieved at three points on the specular truncation rod. The phases and moduli obtained experimentally were consistently explained by a model of a Si(001) single crystal covered with a uniform oxide layer with a rough surface.

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“…(3) into eq. (1), we obtain a formula for the modulation of CTR scattering intensity I CTR ðkÞ under the Bragg condition: 24) I CTR ðkÞ / jA CTR j 2 ð6Þ…”

Section: Theoretical Backgroundmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 96%

A Phase Retrieval Method for Noncrystalline Layers on Crystal Surfaces

Yashiro

Sumitani

Yoda

et al. 2003

Jpn. J. Appl. Phys.

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“…In a previous paper we have reported another approach to investigate strain fields near crystal surfaces using a multiple-wave X-ray diffraction phenomenon, which experimentally provides information on the phase of CTR scattering. The approach uses intensity of CTR scattering modulated by a Bragg reflection [30][31][32][33][34][35][36], and revealed that there is a small strain field distributed over a mesoscopic-scale beneath a SiO 2 /Si interface [36], which is difficult to be found by the conventional X-ray diffraction measurements [37]. However, the depth of the strain field were not determined, although it has to be sufficiently less than the extinction depth of the Bragg reflection used and not a few atomic planes.…”

Section: Introductionmentioning

confidence: 99%

Mesoscopic-Scale and Small Strain Field beneath SiO2/Si Interface Revealed by a Multiple-Wave X-ray Diffraction Phenomenon - Depth of the Strain Field

Yashiro

Yoda

Takahashi

et al. 2011

e-J. Surf. Sci. Nanotechnol.

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Small strain field distributed over a mesoscopic-scale beneath SiO2/Si interface was investigated by using intensity of CTR scattering modulated by a Bragg reflection, which is a multiple-wave X-ray diffraction phenomenon. Assuming that the depth-profile of the total displacement of the strained layer is expressed by an exponential function, we calculated the intensities of the CTR scattering and the Bragg reflection on the basis of the threewave Darwin theory. The results showed that the modulation is sensitive to the total displacement of the atomic layers in the strained layer, while the curve of the Bragg reflection is sensitive to the depth of the strained layer. We compared the results of the numerical calculations with the experimental results of a Si(0 0 1) wafer covered with a thermal oxide layer, which was formed by wet oxidation process at 900 • C, and found that the total displacement in the strained layer is −0.132Å and the depth of the strain field is a few hundreds of nanometers.

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“…From 1998 to 2000, x-ray diffraction techniques utilizing multiple-wave excitation phenomena were independently developed by two groups (Takahashi's group [6] and Akimoto's group [7]) to observe minute strain near a crystal surface. Yashiro et al [8] observed the strain introduced to a Si substrate due to oxidization of the surface by focusing on the modulation of crystal truncation rod (CTR) scattering using the Bragg reflection.…”

Section: Introductionmentioning

confidence: 99%

Behavior of Peak Intensity of Rocking Curve for Asymmetric Bragg Reflection Uniquely Determined by Strain Distribution

Emoto

2013

e-J. Surf. Sci. Nanotechnol.

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Extremely asymmetric x-ray diffraction is a powerful technique for observing minute strains near crystal surfaces. This work focused on the peak intensity of the rocking curve and studied the change in peak intensity with respect to the wavelength of x-rays using dynamical diffraction calculations. From the calculations assuming uniaxial strain along the depth direction of the crystal, it was found that the peak intensity becomes more sensitive to strain as the wavelength decreases below a critical value (critical wavelength λc) at which the total reflection of incident x-rays is enhanced. Comparing the profile of peak intensity vs. wavelength for a strained crystal with that for an unstrained crystal, it is clear that the introduction of compressive or tensile strain causes either enhancement or reduction of the intensity. The difference spectra generated by subtraction of the profile of peak intensity vs. wavelength for an unstrained crystal from that for a strained crystal shows a systematic change with respect to the strain parameters, the maximum strain value ε0 and the thickness of the strained layer H. It is expected that we can evaluate the strain more quickly and easily by fitting the difference spectra than by using the rocking curves when the rocking curves are featureless.

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Effect of surface structure on crystal-truncation-rod scattering under the Bragg condition

Cited by 16 publications

References 20 publications

A Phase Retrieval Method for Noncrystalline Layers on Crystal Surfaces

A Phase Retrieval Method for Noncrystalline Layers on Crystal Surfaces

Mesoscopic-Scale and Small Strain Field beneath SiO2/Si Interface Revealed by a Multiple-Wave X-ray Diffraction Phenomenon - Depth of the Strain Field

Behavior of Peak Intensity of Rocking Curve for Asymmetric Bragg Reflection Uniquely Determined by Strain Distribution

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