Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices

Shen, Sihan; Meng, Yonggang

doi:10.1007/s11249-013-0207-x

Cited by 2 publications

(1 citation statement)

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“…The advances in micro-nano manufacturing technology have promoted the rapid development of microelectronic mechanical systems (MEMS) and micro/nanodevices. Due to the decrease in component size and the enhancement of surface effect, stiction, friction, and wear became significant barriers for the successful development of durable and reliable MEMS ( Maboudian and Carraro, 2004 ; Shen and Meng, 2013 ). Therefore, it is very urgent to design and construct micro-nano self-lubricating system, which can improve the tribological properties between contacting surfaces on micro- and nanoscales.…”

Section: Introductionmentioning

confidence: 99%

High Loading Capacity and Wear Resistance of Graphene Oxide/Organic Molecule Assembled Multilayer Film

Chen

Huang

et al. 2021

Front. Chem.

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Taking advantage of the strong charge interactions between negatively charged graphene oxide (GO) sheets and positively charged poly(diallyldimethylammonium chloride) (PDDA), self-assembled multilayer films of (GO/PDDA)n were created on hydroxylated silicon substrates by alternating electrostatic adsorption of GO and PDDA. The formation and structure of the films were analyzed by means of water contact angle measurement, thickness measurement, atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). Meanwhile, tribological behaviors in micro- and macro- scale were investigated by AFM and a ball-on-plate tribometer, respectively. The results showed that (GO/PDDA)n multilayer films exhibited excellent friction-reducing and anti-wear abilities in both micro- and macro-scale, which was ascribed to the special structure in (GO/PDDA)n multilayer films, namely, a well-stacked GO–GO layered structure and an elastic 3D crystal stack in whole. Such a film structure is suitable for design molecular lubricants for MEMS and other microdevices.

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Section: Introductionmentioning

confidence: 99%