Effect of Substrates on the Properties of ZnO Thin Films Grown by Pulsed Laser Deposition

Taabouche, Adel; Bouabellou, A.; Kermiche, Fouad; Hanini, Faouzi; Menakh, Sarah; Bouachiba, Yassine; Kerdja, T.; Benazzouz, C.; Bouafia, Mohamed; Amara, Saad

doi:10.4236/ampc.2013.34031

Cited by 43 publications

(15 citation statements)

References 19 publications

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“…The most important contribution is due to the (103) diffraction peak of ZnO film at 2θ = 62.4° (JCPDS, No. 36‐1451), which is slightly shifted after NCD growth. The three peaks at 2θ = 34.2°, 35.8°, and 65.7° are relative to the (100), (002), and (103) crystalline plans of hexagonal AlN (JCPDS, No.…”

Section: Resultsmentioning

confidence: 96%

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Dekkar

Bénédic

Floer

et al. 2018

Physica Status Solidi (a)

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In this article, the nanocrystalline diamond (NCD) film low temperature deposition process on ZnO/Si, ZnO/LiNbO3, and ZnO/IDTs/LiNbO3 substrates is investigated aiming at obtaining layered structures suitable for waveguiding layer acoustic wave (WLAW) devices. The NCD synthesis is performed at 250 °C by using a distributed antenna array (DAA) microwave system operating in H2/CH4/CO2 gas mixture at low pressure (<1 mbar). Since the ZnO layer is etched during the NCD growth process, the deposition of a thin AlN layer of few hundred nanometers in thickness on the considered substrates is performed and is shown to be effective as a protective layer. Diamond growth on AlN‐coated ZnO/Si substrates emphasizes the ability of the DAA reactor to synthesize NCD films with properties similar to those obtained on silicon substrates. Besides adherent NCD films up to 300 nm thickness are synthesized on AlN‐coated ZnO/LiNbO3 substrates but stress in the layered structure appears during the plasma process. Finally, the feasibility of a NCD/AlN/ZnO/IDTs/LiNbO3 layered structure, suitable for WLAW devices, is successfully demonstrated, even if the NCD film adherence must be further improved on the inter‐digital transducers (IDTs) finger zone.

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Section: Resultsmentioning

confidence: 96%

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Dekkar

Bénédic

Floer

et al. 2018

Physica Status Solidi (a)

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“…And also, it has other applications, such as piezoelectric devices, spin based electronics or spintronics, luminescent materials, and transparent conductors [6] [8] [15] [16]. Till now ZnO thin films have been synthesized by various techniques including sol-gel spin coating method [4], low pressure chemical vapor deposition (LPCVD) [7] [8], Chemical Both Deposition (CBD) [12], spray-pyrolysis [13] [14], thermal evaporation [17], pulsed laser deposition (PLD) [18], metal organic chemical vapor deposition (MOCVD) [19], sputtering [20], molecular beam epitaxy [21], and Hydrothermal Technique [15], etc. Spray pyrolysis is widely used because of its simplicity, commercial viability, and potential for cost-effective mass production.…”

Section: Introductionmentioning

confidence: 99%

Optical, Structural and Morphological Properties of Photocatalytic ZnO Thin Films Deposited by Pray Pyrolysis Technique

Komaraiah¹,

Radha²,

Vijayakumar³

et al. 2016

MRC

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Photocatalytic ZnO thin films have been deposited onto glass substrate by spray pyrolysis technique. The sprayed solution consists of 0.1 M of zinc acetate dihydrate dissolved in double distilled water and sprays onto ultrasonically cleaned glass substrates maintained at 350˚C, through an air-atomizing nozzle. The X-ray diffraction (XRD), scanning electron microscopy (SEM), EDX and UV-VIS spectrophotometer were applied to describe the structural, morphological, compositional and optical properties of ZnO catalyst. XRD analysis confirms that the films were found to be single phase hexagonal wurtzite structure. The SEM micrograph of the films is shown highly uniform, crack free and found to be fiber like structures. The optical transmittance spectra of the ZnO thin films were found to be transparent to visible light and the average optical transmittance was greater than 85%. The direct optical band gap energy values of the films shift towards the lower energy as a consequence of the thermal annealing. The Urbach energy of the films was found to increase with annealing temperature. The refractive index of the films was calculated and the refractive index dispersion curve of the films obeys the single oscillator model. The values of oscillatory energy E o , dispersion energy E d , and static dielectric constant ε s for the ZnO thin films were determined. The films were evaluated for their ability to degrade methylene blue. The Langmuir-Hinshelwood kinetic model was used to interpret quantitatively the observed kinetic experimental result. The photocatalytic activity of ZnO thin films was enhanced by annealing temperature.

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“…Periasamy et al [18] studied the effect of annealing temperature on the structural, electrical and optical properties of poly crystalline ZnO thin films grown on p-Si(100) and glass substrates by vacuum evaporation technique. Taabouche et al [19] deposited ZnO films on glass and silicon by PLD technique and analysed using X-ray diffraction for phase identification, UV-Visible spectroscopy for energy band gap (3.23 eV) evaluation and atomic force microscopy (AFM) for surface morphology. Zhang et al [20] studied the Ag/ZnO Schottky barrier diodes on F-doped SnO 2 glass substrates and determined the barrier height to be 0.85 and 1.68 eV (100 kHz) by current-voltage (I-V) and capacitance-voltage (C-V) measurements, respectively.…”

Section: Introductionmentioning

confidence: 99%

Growth and temperature dependent characterization of pulsed laser deposited Ag/n-ZnO/p-Si/Al heterojunction

Kumar

Chand

2014

J Mater Sci: Mater Electron

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The Ag/n-ZnO/p-Si(100)/Al heterojunction diodes were fabricated by pulsed laser deposition of zinc oxide (ZnO) thin films on p-type silicon. The X-ray diffraction analysis shows the formation of ZnO thin film with hexagonal structure having strong (002) plane as preferred orientation. The energy band gap of ZnO films simultaneously deposited on quartz substrate was calculated from the measured UV-Visible transmittance spectra. High purity vacuum evaporated silver and aluminum thin films were used to make contacts to the n-ZnO and p-silicon, respectively. The current-voltage and capacitance-voltage characteristics of Ag/n-ZnO/p-Si(100)/Al heterostructures were measured over the temperature range of 80-300 K. The Schottky barrier height and ideality factor were determined by fitting of the measured current-voltage data into thermionic emission diffusion equation. It is observed that the barrier height decreases and the ideality factor increases with decrease of temperature and the activation energy plot exhibit non-linear behavior. This decrease in barrier height and increase in ideality factor at low temperature are attributed to the occurrence Gaussian distribution of barrier heights. The capacitance-voltage characteristics of Ag/n-ZnO/p-Si(100)/Al heterojunction diode were also studied over the wide temperature range. Capacitance-voltage data are used to estimate the barrier height and impurity concentration in n-type ZnO.

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Effect of Substrates on the Properties of ZnO Thin Films Grown by Pulsed Laser Deposition

Cited by 43 publications

References 19 publications

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Optical, Structural and Morphological Properties of Photocatalytic ZnO Thin Films Deposited by Pray Pyrolysis Technique

Growth and temperature dependent characterization of pulsed laser deposited Ag/n-ZnO/p-Si/Al heterojunction

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Effect of Substrates on the Properties of ZnO Thin Films Grown by Pulsed Laser Deposition

Cited by 43 publications

References 19 publications

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Optical, Structural and Morphological Properties of Photocatalytic ZnO Thin Films Deposited by Pray Pyrolysis Technique

Growth and temperature dependent characterization of pulsed laser deposited Ag/n-ZnO/p-Si/Al heterojunction

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Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices