2023
DOI: 10.3390/cryst13040643
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Effect of Substrate Temperature on Variations in the Structural and Optical Properties of Cu2O Thin Films Deposited via RF Magnetron Sputtering

Abstract: In the present study, Cu2O films were deposited on a glass substrate via RF (radio frequency) magnetron sputtering under substrate temperature conditions that ranged from room temperature (RT, 25 °C) to 400 °C. The structural, compositional, and optical properties of the Cu2O films were analyzed in relation to the experimental variables by applying various measurement methods. The substrate temperature was a crucial factor in shaping the structural, compositional, and optical properties of the Cu2O films that … Show more

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Cited by 6 publications
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