Effect of substrate temperature on structural and morphological studies by spray pyrolysed ZnO thin films

Rajalekshmi, E.S.; Raj, A. Moses Ezhil

doi:10.1016/j.ssc.2021.114479

Cited by 6 publications

(2 citation statements)

References 27 publications

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“…M. Hu et al [29] confirmed that cracks gradually disappeared as a result of depositing FeCoNiCrMn HEA metallic film while controlling the substrate temperature from 293 K to 773 K. It can be seen that sufficient diffusion to make a denser thin film was achieved by regulating the substrate temperature [29,30]. However, it is possible to affect the mechanical properties adversely due to phase transformation or the alleviation of defects when the film is formed at a high substrate temperature during the process [21][22][23][24][25][26][27][28][29][30][31][32][33]. Other methods that can increase the diffusion energy of the thin film during the sputtering process include bias control of the substrate, gas flow rate control, and working power control.…”

Section: Introductionmentioning

confidence: 95%

Influence of the Gas Flow Rate on the Crack Formation of AlCoCrNi High-Entropy Metallic Film Fabricated Using Magnetron Sputtering

Kim,

Park,

Kim

et al. 2024

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In the present study, the AlCoCrNi high-entropy metallic film was deposited on a Si wafer using a magnetron sputtering system. To capture the effects of the sputtering parameters on the microstructure and mechanical properties of the film, the flow rate of Ar gas injected into the chamber (5, 7, and 8 sccm) was controlled. All films were identified as being of BCC phase with compositions of near equiatomic proportions, regardless of the gas flow rates. Nano-scale clusters were observed on the surfaces of all films, and nano-cracks were found in the film deposited at the Ar gas flow rate of 8 sccm, unlike the films deposited at the gas flow rates of 5 and 7 sccm. Detailed microstructural analysis of film deposition at an Ar gas flow rate of 8 sccm indicated that the void boundaries contribute to the formation of nano-cracks. The nano-indentation results indicated that the Ar gas flow rate 5 sccm specimen, with the smallest cluster size at the topmost surface, showed the highest hardness (12.21 ± 1.05 GPa) and Young’s modulus (188.1 ± 11 GPa) values.

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Section: Introductionmentioning

confidence: 95%

Influence of the Gas Flow Rate on the Crack Formation of AlCoCrNi High-Entropy Metallic Film Fabricated Using Magnetron Sputtering

Kim,

Park,

Kim

et al. 2024

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“…Zinc oxide thin films have been prepared by various methods, such as nebulizer spray method [5][6][7], chemical vapor deposition [8,9], chemical bath deposition [10,11], sol-gel [12,13], thermal evaporation [14,15], sputtering [16,17] and pulsed laser deposition [18,19] have been deposited for the prodcution of ZnO films. Nebulizer spray pyrolysis techniques has received a little bit of more advantages due to their better homogeneity, stoichiometry control, low cost effectiveness, low processing temperature, simplicity and easier deposition of large area films, and compared to other methods, which allow the possibility of prepared films with the required properties for various applications.…”

Section: Introductionmentioning

confidence: 99%

Low-cost nebulizer spray deposited conduction mechanism of thin film ZnO nanoparticles

Amudhavalli¹,

Mariappan²,

Prasath³

2023

JOR

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The Zinc Oxide (ZnO) thin films have been deposited on glass substrate at different temperature from 300 to 500 o C by nebulizer spray pyrolysis technique. The prepared films were characterized by X-Ray diffraction (XRD), High resolution scanning electron microscope (HRSEM), Energy dispersive analysis by X-rays (EDAX), Photoluminescence (PL), UV-Vis-NIR spectrometer and impedance spectroscopy, respectively. The XRD confirms that the films are polycrystalline in nature with hexagonal wurtzite crystal structure with (002) plane as preferential orientation. The various parameters such as crystallite size, micro strain, and dislocation density were calculated from X-ray diffraction. HR-SEM images show smooth, tiny grains and dense morphology. The PL studies exhibits two emission peaks one at 389 nm corresponding to band gap excitonic emission and another located at 490 nm due to the presence of singly ionized oxygen vacancies. The UV-Vis-NIR spectrometer confirms the possibility of good transparent ZnO films with an average transmission of about ~85-95% in the visible region and optical band gap shifted from 3.37 eV to 3.2 eV with increase in temperature and which is supported by PL study. The semiconductor bahaviour and activation energy of these films have been confirmed by impedance spectroscopy measurements.

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Investigation of structural, morphological and nonlinear optical properties of ZnO thin films using reflective Z-scan technique

Endale,

Loura,

Mohan

2023

Opt Quant Electron

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Effect of substrate temperature on structural and morphological studies by spray pyrolysed ZnO thin films

Cited by 6 publications

References 27 publications

Influence of the Gas Flow Rate on the Crack Formation of AlCoCrNi High-Entropy Metallic Film Fabricated Using Magnetron Sputtering

Influence of the Gas Flow Rate on the Crack Formation of AlCoCrNi High-Entropy Metallic Film Fabricated Using Magnetron Sputtering

Low-cost nebulizer spray deposited conduction mechanism of thin film ZnO nanoparticles

Investigation of structural, morphological and nonlinear optical properties of ZnO thin films using reflective Z-scan technique

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