Effect of Sol-Gel PZT Film Thickness on the Hysteresis Properties

Abstract

An effect of the thickness of ferroelectric sol-gel PZT films on the dielectric hysteresis behavior is studied. Ferroelectric Pb(Zr 0.48 Ti 0.52 )О 3 films with the thickness from 95 to 340 nm are studied. It has been found that the decrease in the film thickness leads to a decrease in the residual polarization and the steepness of the hysteresis loops, while the coercive field increases. At the same time the offset of the hysteresis loop along the voltage axis shows no definite dependence on the film thickness. Experimental results have a good correlation with the damage layer model at the PZT/Pt interface.

Electrodynamic properties of porous PZT‐Pt films at terahertz frequency range

“…It should be noted that thicker porous film (d = 2180 nm) demonstrates higher k value than thinner one (d = 1177 nm) with lower porosity. The reason is an effect of disturbing («dead») nonferroelectric layer on the ferroelectricmetal interface, whose impact increases with decreasing film thickness [9,10]. The dense film has typical perovskite columnar grain structure with the mean grain size ~ 100 nm and mixed (111) and (100) texture [7].…”

Dead layer thickness estimation at the ferroelectric film-metal interface in PZT

“…), and so-called "dead layers". [1][2][3][4][5][6][7][8][9][10] As a rule, the thickness effects are studied by comparison of capacitance of samples with different ferroelectric film thicknesses. The thickness dependence of the effective dielectric constant can be obtained by assuming that a non-ferroelectric layer (dead layer) exists at the metal-ferroelectric interface.…”

“…Table I shows the obtained values of the bulk permittivity e b , the capacity C d , and the dead layer thickness l ss obtained by the smallsignal capacitance technique. [1][2][3][4][5]8 The optical permittivity of PZT films was obtained from ellipsometric measurements as e d ¼ n 2 .…”