Effect of silicon-based substrates and deposition type on sputtered AlN thin films: Physical &amp; chemical properties and suitability for piezoelectric device integration

Signore, M.A.; Velardi, L.; Pascali, Chiara De; Kuznetsova, I. E.; Blasi, L.; Biscaglia, F.; Quaranta, F.; Siciliano, P.; Francioso, Luca

doi:10.1016/j.apsusc.2022.154017

Cited by 5 publications

(2 citation statements)

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“…Sensors 2024, 24, x FOR PEER REVIEW 3 of 13 biocompatibility of the involved material, i.e., Kapton ® substrate [30], AlN [31] and titanium (Ti) [32]. Moreover, the sensor microfabrication process makes it suitable for mass production as a low-cost wearable sensor for biomedical applications.…”

Section: Methodsmentioning

confidence: 99%

“…The fabricated flexible pressure sensor represents a good candidate as a smart wearable sensor designed for breath signal monitoring, providing diagnosis in a non-invasive, fast, and real-time way. It is completely biocompatible due to the stated biocompatibility of the involved material, i.e., Kapton ® substrate [30], AlN [31] and titanium (Ti) [32]. Moreover, the sensor microfabrication process makes it suitable for mass production as a low-cost wearable sensor for biomedical applications.…”

Section: Introductionmentioning

confidence: 99%

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Aluminum Nitride Thin Film Piezoelectric Pressure Sensor for Respiratory Rate Detection

Signore,

Rescio,

Francioso

et al. 2024

Sensors

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In this study, we propose a low-cost piezoelectric flexible pressure sensor fabricated on Kapton® (Kapton™ Dupont) substrate by using aluminum nitride (AlN) thin film, designed for the monitoring of the respiration rate for a fast detection of respiratory anomalies. The device was characterized in the range of 15–30 breaths per minute (bpm), to simulate moderate difficult breathing, borderline normal breathing, and normal spontaneous breathing. These three breathing typologies were artificially reproduced by setting the expiratory to inspiratory ratios (E:I) at 1:1, 2:1, 3:1. The prototype was able to accurately recognize the breath states with a low response time (~35 ms), excellent linearity (R2 = 0.997) and low hysteresis. The piezoelectric device was also characterized by placing it in an activated carbon filter mask to evaluate the pressure generated by exhaled air through breathing acts. The results indicate suitability also for the monitoring of very weak breath, exhibiting good linearity, accuracy, and reproducibility, in very low breath pressures, ranging from 0.09 to 0.16 kPa. These preliminary results are very promising for the future development of smart wearable devices able to monitor different patients breathing patterns, also related to breathing diseases, providing a suitable real-time diagnosis in a non-invasive and fast way.

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Section: Methodsmentioning

confidence: 99%