2014
DOI: 10.1021/am504305k
|View full text |Cite
|
Sign up to set email alerts
|

Effect of Silane Coupling Agent Chemistry on Electrical Breakdown Across Hybrid Organic–Inorganic Insulating Films

Abstract: Dielectric breakdown measurements were conducted on self-assembled monolayer (SAM)/native silicon oxide hybrid dielectrics using conductive atomic force microscopy (C-AFM). By depositing silane coupling agents (SCAs) through a diffusional barrier layer, SAM roughness was decoupled from chemistry to compare the chemical effects of exposed R-group functionality on * Author to whom correspondence should be addressed. Electronic mail: rdiebold@seas.harvard.edu. 2 dielectric breakdown. Using Weibull and current-vol… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2018
2018
2024
2024

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 7 publications
(1 citation statement)
references
References 47 publications
0
1
0
Order By: Relevance
“…A Hammett linear free energy relationship was used to correlate the interface polarity and electron delocalization to the dielectric properties of nanocomposites, and the advantage of electropositive ligands in minimizing leakage current and dielectric loss could be characterized with a linear Hammett relationship against group polarity effects. Diebold et al also studied the effects of silane coupling agent chemistry on breakdown properties when they are bonded on the silicon oxide surface. Various silane coupling agents with different molecular structures were deposited on the native silicon oxide, and the breakdown strengths of the silane coupling agents/silicon oxide hybrid dielectrics were measured with conductive atomic force microscopy.…”
Section: Interfacial Enhancement Effect Of Breakdown Strength and Diementioning
confidence: 99%
“…A Hammett linear free energy relationship was used to correlate the interface polarity and electron delocalization to the dielectric properties of nanocomposites, and the advantage of electropositive ligands in minimizing leakage current and dielectric loss could be characterized with a linear Hammett relationship against group polarity effects. Diebold et al also studied the effects of silane coupling agent chemistry on breakdown properties when they are bonded on the silicon oxide surface. Various silane coupling agents with different molecular structures were deposited on the native silicon oxide, and the breakdown strengths of the silane coupling agents/silicon oxide hybrid dielectrics were measured with conductive atomic force microscopy.…”
Section: Interfacial Enhancement Effect Of Breakdown Strength and Diementioning
confidence: 99%