2017
DOI: 10.1016/j.apsusc.2017.02.210
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Effect of Sb content on the thermoelectric properties of annealed CoSb 3 thin films deposited via RF co-sputtering

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Cited by 10 publications
(7 citation statements)
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“…32 However, it was found that the optical band gap varied from 0.5 to 0.9 eV. 33 The Raman spectra of P, PA, I 1E15 A, I 2.5E15 A and I 5E15 A thin lms measured at 300 K are shown in Fig. 3.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…32 However, it was found that the optical band gap varied from 0.5 to 0.9 eV. 33 The Raman spectra of P, PA, I 1E15 A, I 2.5E15 A and I 5E15 A thin lms measured at 300 K are shown in Fig. 3.…”
Section: Resultsmentioning
confidence: 99%
“…However, there is no literature found on the studies of doping of Fe on CoSb 3 by the ion implantation method. Among the thin lm deposition techniques that have been carried out for the deposition of pure phase CoSb 3 are the solvothermal, 31 RF sputtering, 32,33 pulsed laser deposition (PLD) [34][35][36][37] and DC sputtering. 26 Of these techniques, PLD has proven to be one of the well-suited methods for the deposition of CoSb 3 lms with proper stoichiometry.…”
Section: Introductionmentioning
confidence: 99%
“…20 Therefore, many studies on the synthesis of high performance thin films, including CoSb 3 films, have been investigated. [21][22][23][24][25][26] For example, A. Ahmed et al 27 obtained a power factor of 7.92 mW m K −2 for the CoSb 2 -containing mixed phase thin film and 1.26 mW m K −2 for the stoichiometric CoSb 3 thin film. However, TE properties of CoSb 3 thin films remain lower than those of bulk materials due to the difficulty of controlling precisely the composition of the thin films.…”
Section: Introductionmentioning
confidence: 99%
“…To determine the optimized film deposition parameters, the influences of composition and substrate temperature on crystal quality and orientation, microstructure, and TE properties were investigated using high-resolution scanning electron microscopy (HR-SEM), energy dispersive X-ray spectroscopy (EDS), and X-ray diffraction (XRD). The details of the characterization process are described in our previous publications 14,43 . The Hall measurements were performed on several mm side square samples using an Ecopia HMS-5000 room temperature Hall effect system.…”
Section: Methodsmentioning
confidence: 99%