Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure

Abstract

A one-dimensional fluid model is built to study the effect of radio frequency (RF) on the characteristics of RF nitrogen discharge with induced argon plasma at high pressure. The model is solved by a finite difference method, and the numerical results are obtained. The numerical results show that by modulating driven frequency, the discharge can obtain higher plasma density. Moreover, the discharge is operated in a stable α mode in a range of 100 MHz of driven frequency.

DC Glow Discharge in Axial Magnetic Field at Low Pressures

“…The relations between the physical quantities and some physical phenomena can not be explained strictly. Most authors use numerical methods in the theoretical study [7][8][9][10][11][12][13][14]. With the development of computer and algorithm optimization, these methods provide a good foundation and guarantee with great achievements made in this field.…”