Effect of reanodization on exoelectron emission of anodic Ta2O5 films

Abstract

The effect of reanodization on the thermally stimulated exoelectron emission (TSEE) from anodic Ta2O5 films is investigated. The thickness dependence of TSEE indicates that oxygen vacancies induced by heat treatment in the oxide film play the role of the emission‐active centres. It is confirmed by the reanodization technique that the distributions of oxygen vacancies are expressed by two exponentials. The mean attenuation length of exoelectrons (L) and the attenuation constants of oxygen vacancy distributions (μi and μs) are estimated experimentally.