2022
DOI: 10.1016/j.rio.2022.100265
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Effect of quality of opto-mechanical components on fringes of diffraction Lloyd mirror interferometer

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Cited by 3 publications
(1 citation statement)
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“…This interferometer works on the principle of superimposing two diffracted and geometrical waves. The interference pattern obtained by this interferometer covers a large area due to the presence of diffracted light over there 9,10 . For the purpose of validating the feasibility of proposed set-up to measure step heights, metallic coated mirror, silicon mirror, and photopolymer film coated on a glass substrate with steps in coatings are used as test samples.…”
Section: Introductionmentioning
confidence: 99%
“…This interferometer works on the principle of superimposing two diffracted and geometrical waves. The interference pattern obtained by this interferometer covers a large area due to the presence of diffracted light over there 9,10 . For the purpose of validating the feasibility of proposed set-up to measure step heights, metallic coated mirror, silicon mirror, and photopolymer film coated on a glass substrate with steps in coatings are used as test samples.…”
Section: Introductionmentioning
confidence: 99%