Effect of Pulsing Configuration and Magnetic Balance Degree on Mechanical Properties of CrN Coatings Deposited by Bipolar-HiPIMS onto Floating Substrate

Abstract

Despite its great potential for thin films deposition and technological applications, the HiPIMS technology has its own limitations including the control of ion energy and flux towards the substrate when coping with the deposition of electrical insulating films and/or the deposition onto insulating/electrically grounded substrates. The bipolar-HiPIMS has been recently developed as a strategy to accelerate the plasma ions towards a growing film maintained at ground potential. In this work, the benefits of bipolar-HiPIMS deposition onto floating or nonconductive substrates are explored. The effect of bipolar-HIPIMS pulsing configuration, magnetic balance-unbalance degree, and substrate’s condition on plasma characteristics, microstructure evolution, and mechanical properties of CrN coatings was investigated. During the deposition with a balanced magnetron configuration, a significant ion bombardment effect was detected when short negative pulses and relative long positive pulses were used. XRD analysis and AFM observations revealed significant microstructural changes by increasing the positive pulse duration, which results in an increase in hardness from 7.3 to 16.2 GPa, during deposition on grounded substrates, and from 4.9 to 9.4 GPa during the deposition on floating substrates. The discrepancies between the hardness values of the films deposited on floating substrates and those of the films deposited on grounded substrates become smaller/larger when a type I/type II unbalanced magnetron configuration is used. Their hardness ratio was found to be 0.887, in the first case, and 0.393, in the second one. Advanced application-tailored coatings can be deposited onto floating substrates by using the bipolar-HiPIMS technology if short negative pulses, relative long positive pulses together with type I unbalanced magnetron are concomitantly used.

Evidence for fireballs in bipolar HiPIMS plasmas

“…BP-HiPIMS has been studied as a means of depositing engineering quality thin films, including Cu [9,19,20], Ti [21], diamond like carbon [22,23], CrN [24,25] and cobalt oxide [26]. In addition to these materials, the basic processes in BP-HiPIMS discharges have been investigated directly using plasma diagnostic tools.…”