Abstract:The effects of pulse modulation on particle growth by coagulation between particles in a pulsed SiH 4 plasma reactor were analyzed by using a discrete-sectional method. At the start of the plasma discharge, there is high concentration of small-sized particles, and, later, the large-sized particles appear and grow by coagulation between smallsized particles. During plasma-off, the monomer generation stops and the particle concentration decreases with time by the effects of particle coagulation and fluid flow. A… Show more
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