Effects of filler content and coupling agent on mechanical properties of underfill (UF) were investigated using standard UF materials which are composed bisphenol F-type epoxy resin and spheroidal SiO 2 filler. For the effect of filler content, elastic modulus of UF increased and fracture strain decreased with increasing the filler content. On the contrary, the effect on tensile strength was negligible. When the temperature was above Tg, elastic modulus decreased and fracture strain increased remarkably. Fracture mainly occurred in matrix resin below Tg and in the interface between matrix resin and filler above Tg. Moreover, it was confirmed that tensile strength and fracture strain were decreased by aging treatment. For the effect of coupling agent, elastic modulus and tensile strength of UF were increased by coupling treatment. Fracture strain was increased at R.T., but was decreased at 80°C and 120°C by coupling treatment. Tensile strength depends on the interfacial state of matrix resin and fillers. Peeling of fillers from matrix resin was suppressed by coupling treatment at the temperature under 80°C. Fracture mode of UF with coupling treatment changed from matrix fracture to interfacial fracture in the boundary of Tg.