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2004
DOI: 10.1016/j.tsf.2004.05.018
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Effect of processing parameters on electroless Cu seed layer properties

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Cited by 23 publications
(15 citation statements)
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“…It was noted that 60 min was the critical time that a continuously dense Cu film starts forming. This work shows that before a dense film was formed, the orientation of Cu grains was probably either random or preferred (1 0 0) [42], and the diffraction intensity on films below 30 min was too low to reach a solid conclusion. However, it was evident that once a dense film is formed, the (1 1 1) texture was quickly established.…”
Section: Resultsmentioning
confidence: 83%
“…It was noted that 60 min was the critical time that a continuously dense Cu film starts forming. This work shows that before a dense film was formed, the orientation of Cu grains was probably either random or preferred (1 0 0) [42], and the diffraction intensity on films below 30 min was too low to reach a solid conclusion. However, it was evident that once a dense film is formed, the (1 1 1) texture was quickly established.…”
Section: Resultsmentioning
confidence: 83%
“…An oxide etching is therefore often added to the solution to yield thicker films . Precise control of nanoparticles diameter and density with this approach is difficult due to the relatively high kinetic of the nanoparticles’ growth on the surface …”
Section: Introductionmentioning
confidence: 99%
“…Most electroless copper methods deposit metal in alkaline bath. This method needs some activation and sensitization pretreatment and then the copper metal layer is oxygenated easily in the air 10, 16, 17. In this study, the acid electroless copper method is used to deposit copper‐sulfide deposition on the substrate for EMI shielding effectiveness (SE), and the copper‐sulfide compound contains antioxidation in the air.…”
Section: Introductionmentioning
confidence: 99%