is a wide-bandgap semiconductor suitable for use in high-temperature electronics. It is therefore important to understand its thermal stability. We report the results of a study on thermal degradation of MoS 2 monolayers supported on SrTiO 3 substrates in ultrahigh vacuum (UHV). Our studies were carried out on the (111), (110), and (001) terminations of SrTiO 3 substrates, but MoS 2 was found to degrade on all of these surfaces in a similar way. By scanning tunneling microscopy, we show that MoS 2 monolayer crystals maintain their structure up to 700 °C under UHV, at which point triangular etch trenches appear along the ⟨21̅ 1̅ 0⟩ lattice directions (i.e., sulfur-terminated edge directions) of the MoS 2 crystals. The trenches are due to the preferential loss of sulfur, allowing molybdenum to be oxidized by oxygen originating from the SrTiO 3 substrate. The intensity of the A-exciton photoluminescence (PL) peak and the E 2g 1 and A 1g Raman signals reduced significantly following treatment at this temperature. The crystals continue to degrade at higher annealing temperatures in UHV until they transform into MoO x (x = 2−3) particles at 900 °C, and the optical properties characteristic of MoS 2 are lost entirely in PL and Raman spectra. The initial sulfur loss and the formation of MoO x are confirmed by X-ray photoelectron spectroscopy. The macroscopic triangular shapes of the MoS 2 crystals are retained until the residual particles evaporate at above 1000 °C. The optical properties of the 700 and 800 °C UHV-annealed samples can be partially recovered upon sulfur annealing. This work establishes a pathway of the thermal degradation of SrTiO 3 -supported monolayer MoS 2 in vacuum from smooth MoS 2 crystals to crystals with sulfur vacancies (etch trenches), followed by MoO 2 and finally MoO 3 particles. We also demonstrate how sulfur annealing can be used to heal the defects.