“…3) Researchers have developed high-performance CO sensors based on different mechanisms, such as optical, resistive, electrochemical, potentiometric, and thermoelectric methods. [4][5][6][7][8][9] However, various problems posed by complicated and time-consuming processes, sensitivity degradation, and high costs make it difficult to apply the currently available gas sensors in industrial settings. Metal-oxide semiconductor (MOS) gas sensors based on microelectromechanical system technology are most widely used because of their simple process, small size, possibility of mass production, and easy integration into circuits and signal processing.…”