2008
DOI: 10.1143/jjap.47.6896
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Effect of Oxygen Concentration on Properties of Indium Zinc Oxide Thin Films for Flexible Dye-Sensitized Solar Cell

Abstract: Indium zinc oxide (In 2 O 3 -ZnO, IZO) thin films were prepared with variation of oxygen concentration in Ar sputtering gas using rf magnetron sputtering system. Transmittance was greatly improved from 75 to 90% since surface roughness slightly decreased by adding oxygen and low resistivity of 3:28 Â 10 À4 cm was achieved at 0.4% oxygen concentration. The performance of dye sensitized solar cell (DSSC) was also studied by fabricating cells with IZO thin films using UV/ozone treatment. According to the results,… Show more

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Cited by 31 publications
(17 citation statements)
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“…Amorphous TCOs, such as indium zinc oxide (IZO), are therefore advantageous as they can be deposited at low power, low temperature and without the addition of oxygen, while maintaining excellent electrical and optical properties. Deposited on glass substrates, IZO has already been applied as a front electrode in opaque perovskite [18] and dyesensitized solar cells [19,20].…”
Section: Introductionmentioning
confidence: 99%
“…Amorphous TCOs, such as indium zinc oxide (IZO), are therefore advantageous as they can be deposited at low power, low temperature and without the addition of oxygen, while maintaining excellent electrical and optical properties. Deposited on glass substrates, IZO has already been applied as a front electrode in opaque perovskite [18] and dyesensitized solar cells [19,20].…”
Section: Introductionmentioning
confidence: 99%
“…7), In (Ref. 8), Al (Ref. 9) for application as transparent conductor in solar cells, 10 organic LEDs, 11 and transparent electronic devices.…”
Section: Introductionmentioning
confidence: 99%
“…1,2) They are widely applied in various optoelectronic devices, such as the active channel layer of thin film transistors (TFTs) 3,4) and the electrodes of organic light emitting devices or thin film solar cells. [5][6][7][8] Various technologies have been used to prepare ZnO-based thin films, such as RF/DC magnetic sputtering, 9,10) pulsed laser deposition (PLD), 11) chemical vapor deposition (CVD) 12) and the sol-gel method. 13,14) Among these techniques, the sol-gel method enjoys advantages of simplicity, safety, low cost and easy adjustment of composition.…”
Section: Introductionmentioning
confidence: 99%