2015
DOI: 10.1007/s10854-015-3310-y
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Effect of O2 flow rate in the annealing process on metal–insulator transition of vanadium oxide thin films

Abstract: Vanadium oxide (VO x ) thin films were fabricated on the sapphire substrates by sputtering deposition and subsequent rapid-thermal-annealing (RTA) process. The effect of O 2 flow rate on the crystal structure, surface morphology and phase transition property of thin films was studied. The results indicated that VO x thin films were polycrystalline structures and consisted of irregular blockyshaped grains. As the O 2 flow rate increased from 3 to 4.5 slpm, the oxidation was enhanced and the grain size decreased… Show more

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Cited by 8 publications
(4 citation statements)
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“…The phase transition amplitude of the samples is similar, and the sheet resistance at room temperature (r L ) and high temperature (r H ) decrease with increasing thickness. To characterize the metalsemiconductor phase transition properties of the samples in details, the phase transition temperature (T c ), 28 thermal hysteresis loop width (H) 29 and phase transition amplitude (B) 30 were calculated according to the resistance-temperature curves by the equation:…”
Section: Resultsmentioning
confidence: 99%
“…The phase transition amplitude of the samples is similar, and the sheet resistance at room temperature (r L ) and high temperature (r H ) decrease with increasing thickness. To characterize the metalsemiconductor phase transition properties of the samples in details, the phase transition temperature (T c ), 28 thermal hysteresis loop width (H) 29 and phase transition amplitude (B) 30 were calculated according to the resistance-temperature curves by the equation:…”
Section: Resultsmentioning
confidence: 99%
“…To compare the MIT properties of the different samples, the phase transition magnitudes and the transition temperatures of the VO 2 thin films are defined according to previous studies. 25,30 The phase transition magnitude ( R) is defined as: R = R L R H [9] where R L and R H are the sheet resistances at 28 • C and 90 • C, respectively. R L is the maximum sheet resistance before the transition, and R H is the minimum sheet resistance after the transition.…”
Section: Mit Characteristic Of the Filmsmentioning
confidence: 99%
“…Among various resistivity-temperature sensitive resistors (i.e., thermistors), the ones showing a positive temperature coefficient (PTC) or negative temperature coefficient (NTC) effect are extensively applied in industrial and domestic devices for the temperature measurement, automatic control, temperature compensation and voltage stabilization, owing to their high sensitivity and reliability. Meanwhile, the transition metal oxides such as VO 2 and V 2 O 3 with the metal-insulator transition feature are also of interest in practical applications and theoretical research [1][2][3][4][5]. In the traditional PTC ceramic thermistors, BaTiO 3 -based compounds are the most important ones for the practical applications [6][7][8].…”
Section: Introductionmentioning
confidence: 99%