2015
DOI: 10.4028/www.scientific.net/ssp.242.279
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Effect of Nitrogen-Doping on the Properties of Radiation Defect Centers in FZ Silicon

Abstract: High-resolution photoinduced transient spectroscopy (HRPITS) has been applied to determining the properties and concentrations of radiation defect centers formed in FZ silicon single crystals subjected to doping with phosphorus in neutron transmutation processes. The studies were performed immediately after the neutron irradiation on the samples with the resistivity of the order of 105 Ωcm. The preset target resistivity was around 2000 Ωcm. The N-doping effect on the material radiation damage has been demonstr… Show more

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Cited by 1 publication
(3 citation statements)
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References 10 publications
(27 reference statements)
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“…For DOFZ this result is expected, as measurements done in [1] show that no improvements were observed for oxygenated silicon under irradiation with neutrons. For NIT the predicted improvements from measurements done in [3] could not be confirmed. The most likely cause being the lower concentration of the di-interstitial nitrogen defect.…”
Section: Electrical Characterizationmentioning
confidence: 86%
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“…For DOFZ this result is expected, as measurements done in [1] show that no improvements were observed for oxygenated silicon under irradiation with neutrons. For NIT the predicted improvements from measurements done in [3] could not be confirmed. The most likely cause being the lower concentration of the di-interstitial nitrogen defect.…”
Section: Electrical Characterizationmentioning
confidence: 86%
“…However the di-interstitial nitrogen defect is only stable up to 900 • C and thus the high temperature processing is the most likely cause for the nitrogen loss [8,9]. The thermal budget to which the wafers were exposed during device processing was dominated by the initial oxidation steps at 1100 • C, with a total estimated time of about 4 h. Thus possible improvements from nitrogen enrichment will be smaller than shown in [3]. The following measurements will aim to understand, if any advantages from nitrogen enrichment are retained.…”
Section: Sims Measurementsmentioning
confidence: 99%
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