In this paper we present an experimental study of migration of atoms and molecules of the substrate material in the thickness of the film in the direction of the surface by means of laser desorption mass spectrometry. The method is based on the time-of-flight principle of particle detection, desorbed from the sample surface by a laser pulse (LP) of nanosecond duration [. The main advantage of TOF mass spectrometer is that the registration of product desorption is carried out at the site of direct flight from the sample to the ion source, i. e. in the mass spectrum does not participate particle, reflected from the walls and other elements. In addition, the method allows to measure the time delay of the particles emission, relative to the exciting laser irradiation [.