Effect of neutral gas heating in argon radio frequency inductively coupled plasma

Chin, O. H.; Jayapalan, Kanesh Kumar; Wong, C. S.

doi:10.1142/s2010194514603202

Cited by 1 publication

(5 citation statements)

References 14 publications

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“…As shown in figure 3, the optimum chamber radius in order to have the best RF power deposition is 12 cm, but it is possible to increase it up to 19 cm. This issue is confirmed based on the geometric dimensions of the constructed devices [16].…”

Section: Modeling Optimization and Validation Of Ampicp Modelmentioning

confidence: 63%

“…As a result of electron collisions, the energy will be transferred to the heavy particles in order to have Ohmic Heating (OH). Then using momentum equation, Maxwell's equations and boundary conditions and assuming a low excitation frequency of sinusoidal time-varying EM fields of RF generator, one can ignore the displacement current to achieve EM fields' components as following [1,[13][14][15][16]. Now, using the method of separation of variables, the analytical solutions for the electric and magnetic fields inside the inductively coupled RF plasma source can be summarized as following equations set: In which A n , B n , C n , λ n , k n , L and D were derived and introduced in our previous paper [1].…”

Section: Theoretical Approachmentioning

confidence: 99%

“…In order to run code and simulate H mode electromagnetic fields, spatially neutral gas temperatures, T n (r, z), spatially electron temperatures, T e (r, z), and electron densities, n e (r, z) are required. These quantities were empirically fitted using 2D Gaussian based distributions from published experimental data [2,3,[14][15][16]. The data that could be used to validate the model is related to plasma sources which have highly nonlinear behavior.…”

Section: Modeling Optimization and Validation Of Ampicp Modelmentioning

confidence: 99%

“…The optimized values for designing and operating parameters obtained from AMPICP model are summarized in table 4. These values are compared with the characteristics of a laboratory reactor [16].…”

Section: (Cm) Ementioning

confidence: 99%

“…Since B • ∆(r A θ ) = 0, the contours of equal r A θ values, depict the flux surfaces of magnetic field [19]. Figure 6 shows the calculated magnetic fields for two cases: optimized geometry of a chamber and a built chamber [16].…”

Section: Simulation and Optimization Of The Em Fields Using The Ampic...mentioning

confidence: 99%

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Design and optimization of an ICP reactor with planar antenna as a driver in ISTAPHM and validation of AMPICP model

Ghanei

Nasrabadi

2019

J. Inst.

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The present work is related to the method for designing a driver for low pressure plasma sources using the AMPICP model. Particularly, it is related to equipment for producing plasma, which can be used for driver of the simulator project (ISTAPHM) of the interactions between ICRF antenna and plasma on Tokamak Nuclear Fusion Reactors. Here, two important aspects of this modeling are discussed: firstly, optimization of geometrical parameters for driver of source plasma in ISTAPHM and secondly, Simulation and computation of the EM fields adjusted for a planar antenna (PA) of driver. The work is focused on the characterization of low pressure Inductively Coupled Plasma (ICP) source and the features of a helicon chamber. Numerical simulations of ICP with PA were presented to optimize the plasma characteristics. The results of the AMPICP model for designing of ICP reactor as the driver in ISTAPHM were also evaluated using the power balance model. This paper also presents a two dimensional simulation for the EM field inside the ICP reactor for homogeneous plasma and compares the optimized and laboratory results with each other. From the measurements of the magnetic field inside the reactor using a magnetic probe, the electron number density and effective collision frequency can be estimated. The form of magnetic field lines inside the vessel was investigated and theoretical field lines were presented in the paper. The results of analyses as a function of operating parameters were presented to be measured with fixed and movable Langmuir probes. Optical Emission Spectra were recorded for different gas flow rates and filling pressures at constant power level by spectrometer. The variation in the intensity ratio of the selected emission lines, electron temperature and density was studied as a function of gas flow rate and filling pressure. K: Plasma diagnostics -probes; Plasma generation (laser-produced, RF, x ray-produced)1Corresponding author.

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Section: Modeling Optimization and Validation Of Ampicp Modelmentioning

confidence: 63%