Effect of Near-Field Diffraction in Photolithography of Hexagonal Arrays for Dichroic Filters

Zhou, Shaolin; Liu, Junbo; Deng, Qian; Xie, Changqing; Chan, Mansun

doi:10.1109/jphot.2016.2594032

Cited by 1 publication

(1 citation statement)

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“…[ 41,42 ] This is a near‐field diffraction phenomenon that reconstructs the image of the grating at a certain distance. Here, we show the self‐images at

z = z_{normalt}, 2 z_{normalt}

, where the Talbot length for hexagonal symmetry is

z_{normalt} = 3 d^{2} / 2 λ

, [ 17,55,56 ] d is the pitch of the grating, and λ is the wavelength of the He–Ne laser. Importantly, the self‐image also showed the interference of OVs.…”

Section: Resultsmentioning

confidence: 99%

Lensless Wavefront Parallel Processing of Vector Beams by Self‐Images of a Self‐Organized Q‐Plates Microarray

Sasaki

Yamazaki

Murakami

et al. 2022

Advanced Photonics Research

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Wavefront shaping of structured light beams is attracting considerable attention in optics and related technologies. Due to the potential benefits, it is crucial to develop versatile methods for controlling the wavefront in a compact space with the capacity for high‐throughput parallel processing. Herein, a unique concept is introduced for converting the wavefront of multiple structured light beams, which are periodically packed in a microscopic area. An experimental demonstration is provided by using transmissive planar optical elements consisting of a microarray of geometric phase based on nematic liquid crystals. The periodic microstructure is fabricated by the directed self‐organization of topological defects present in a nanoscale relief obtained by area‐selective surface modification. The conversion of multiple wavefronts is realized by using the Talbot self‐imaging effect of the microarray. The integrated geometric phase microarray has potential applications in vortex beam emitters to harness structured light, such as for optical manipulation and lithography.

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“…[ 41,42 ] This is a near‐field diffraction phenomenon that reconstructs the image of the grating at a certain distance. Here, we show the self‐images at

z = z_{normalt}, 2 z_{normalt}

, where the Talbot length for hexagonal symmetry is

z_{normalt} = 3 d^{2} / 2 λ

, [ 17,55,56 ] d is the pitch of the grating, and λ is the wavelength of the He–Ne laser. Importantly, the self‐image also showed the interference of OVs.…”

Section: Resultsmentioning

confidence: 99%