Effect of N2/Ar on structure and hardness of TaN-Ag thin films deposited by DC cylindrical magnetron sputtering

Foadi, Farnaz; Darabi, Elham; Hantehzadeh, Mohammad Reza

doi:10.1140/epjp/i2014-14080-8

Cited by 3 publications

(1 citation statement)

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“…Many investigations have been carried out in order to catch this aim. The influences of coating temperature, 30 gas pressure, [31][32][33] bias voltage, 34 sputtering power, [35][36][37] and the ratio of nitrogen pressure to argon pressure [38][39][40][41] have been studied in various studies. Despite the fact that the influence of nitrogen on the TaN layer has been studied in a few papers, the influence arising from the ratio of N 2 pressure to argon pressure (P N2 /P Ar ) on corrosion behavior has not been investigated yet.…”

Section: Introductionmentioning

confidence: 99%

Studying the in vitro corrosion response of nanostructured TaN coatings in Hank's physiological solution

Babaei

Fattah‐alhosseini

Elmkhah

et al. 2021

Int J Applied Ceramic Tech

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The goal of this research is to determine the effect of N 2 pressure to argon pressure on the microstructural analysis and corrosion behavior of nanostructured TaN deposited coatings using a reactive DC-magnetron sputtering (RDCMS) technique.The samples coated microstructure was studied by the X-ray diffraction (XRD) and scanning electron microscope (SEM), and elemental distribution was studied using energy-dispersive X-ray spectroscopy (EDS). To investigate the corrosion behavior of nanostructured TaN coatings, the potentiodynamic polarization (PDP) and electrochemical impedance spectroscopy (EIS) tests were performed in Hank's physiological solution. The results of different tests revealed that the coating with a content of 17.6% P N2 /P Ar consisted of hexagonal and orthorhombic TaN phases and had denser microstructure and free pores. This coating showed superior corrosion behavior in comparison to the other ones. Also, the corrosion resistance of this coating raised by increasing the time of immersion from 48 to 168 h.

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