Effect of N2 ambient annealing on the field emission properties of HfNxOy thin films

Cai, Xing-Min; Ye, F.; Xie, Erqing; Zhang, D.P.; Fan, Ping

doi:10.1007/s00339-007-4324-y

Cited by 3 publications

(3 citation statements)

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“…12,13 Among them, hafnium oxynitride film has become one of the most fascinating films due to their peculiarly multifunctional properties. [14][15][16][17][18][19][20][21] Various processes including reactive magnetron sputtering, 15,22 ion beam assisted deposition 18 and chemical vapour deposition 16 have been adopted to prepare hafnium oxynitride films. One of the most important and promising applications is the super mechanical properties of oxynitride films, which closely dependent on nitrogen content.…”

Section: Introductionmentioning

confidence: 99%

“…12,13 Among them, hafnium oxynitride film has become one of the most fascinating films due to their peculiarly multifunctional properties. 14-21…”

Section: Introductionmentioning

confidence: 99%

“…Various processes including reactive magnetron sputtering, 15,22 ion beam assisted deposition 18 and chemical vapour deposition 16 have been adopted to prepare hafnium oxynitride films. One of the most important and promising applications is the super mechanical properties of oxynitride films, which closely dependent on nitrogen content.…”

Section: Introductionmentioning

confidence: 99%

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Enhanced mechanical properties of HfO₂ film by nitrogen doping

Lei

Guo

Zhu

et al. 2016

Surface Engineering

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The chemical composition, structure and mechanical properties of hafnium oxide films with different nitrogen constituents were investigated. X-ray photoelectron spectrum analysis showed that nitrogen atoms acted as oxygen substitution and interstitial atoms. The crystalline features exhibited no change during nitrogen doping. Nevertheless, the films with high compressive stress displayed significantly enhanced mechanical properties. The enhanced mechanism could mainly be attributed to the dislocation obstacle motion by inserting nitrogen atoms.

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