Effect of misalignment on the dynamic characteristic of MEMS gas bearing considering rarefaction effect

Li, Liangliang; Zhang, Di; Xie, Yuanyuan

doi:10.1016/j.triboint.2019.06.015

Cited by 34 publications

(17 citation statements)

References 30 publications

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“…Similarly, the gas film pressure can be processed using the small perturbation method. Then, substituting perturbation pressure into Equation 3, the partial derivative method can be used [17,30]. The equations in two directions can be decoupled:…”

Section: Control Equations and Solution Methodsmentioning

confidence: 99%

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Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Liu

Wang

et al. 2020

Micromachines

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Gas-lubricated microbearings are widely applied in multiple fields due to their advantages of high-speed, low friction level and other features. The operating environment of microbearings is complex, and the difference of temperature has an important influence on their comprehensive performance. In this investigation, FEM (finite element method) is employed to investigate the static, dynamic and limit characteristics of microbearings lubricated by different kinds of gas at different temperatures. The results show that the rise of temperature leads to the decline of equivalent viscosity of gas, which weakens the load capacity of microbearings, and furthermore, affects the operating stability of microbearings. The dynamic performances of microbearings at different temperatures are very different, and the two dynamic limit characteristics are more sensitive to temperature when it changes.

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Section: Control Equations and Solution Methodsmentioning

confidence: 99%

“…Due to its lower calculation cost and higher precision, the FK model had been applied in various cases. In recent years, by using the FK model, some scholars [16,17] have found that the rarefaction effect has a large influence on the load capacity and attitude angle of MEMS bearing compared with those in the continuous model.…”

Section: Introductionmentioning

confidence: 99%

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Liu

Wang

et al. 2020

Micromachines

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“…For MEMS gas bearing, the scale of the molecular free path cannot be negligible relative to the characteristic film thickness. Previous studies have shown that the flow state in the bearing clearance is a typical slip flow [26], and the simulation accuracy is not good enough to describe the flow state using the traditional Reynolds equation. According to the theory of S. Fukui and R. Kaneko [11,12], the lubrication equation can be obtained by the Boltzmann equation based on the theory of molecular dynamics under any Kn number.…”

Section: Solution Of the Lubrication Equation Considering The Rarefacmentioning

confidence: 99%

“…The dynamic characteristic coefficients of the MEMS gas bearing are closely related to the perturbation frequency ratio (Ω) of the journal [26]. The dynamic coefficients of the gas bearing when Ω = 1 are taken as a demonstration here.…”

Section: Sensitivity Analysis Of Axial Wearmentioning

confidence: 99%

Probabilistic Sensitivity Analysis of Wear Property for MEMS Gas Bearing

Zhang

Xie

2019

Applied Sciences

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In this study, the sensitivity of MEMS gas bearing’ performance to the wear in different axial and circumferential positions is investigated in detail. Rarefaction effect is introduced into the transient and steady lubrication equation, and then the finite element method (FEM) is employed to solve the equations. The stochastic process is adopted to simulate wear distribution and view of probability is proposed to describe the change laws of the static and dynamic performance of the bearing. Then, the static and dynamic characteristics of the bearing in 50 wear conditions are calculated for each case. Furthermore, the standard deviations and correlation coefficients of the bearing performance sample points are analyzed to demonstrate the influence degree of wear in different positions.

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“…In conventional gas bearing analysis and design procedures, the bearing characteristics are determined by assuming that the fluid flow in the gas films is in isothermal continuum and that the bearing pads are rigid bodies. As the gas film thickness becomes thinner, the flow behaviors of the compressible gas at the micro-scale differ from those at macro-scale, and the continuum theory may lose its usefulness [7][8][9][10]. The effect of gas rarefaction is the most important factor that considerably affects the bearing performance in microfluidic devices.…”

Section: Introductionmentioning

confidence: 99%

Thermo-Elasto-Hydrodynamic Characteristics Analysis of Journal Microbearing Lubricated with Rarefied Gas

Liu

2020

Micromachines

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Temperature rise and elastic deformation are unavoidable issues occurring in high-speed gas microbearings due to the dominant small-scale fluid dynamics in rarefied gas flow applications. In this paper, thermo-elasto-aerodynamic analysis requires simultaneously solving the modified Reynolds equation, modified energy equation, temperature–viscosity relationship and the elasticity equations for predicting the lubrication characteristics of microbearings. A thermo-elasto-aerodynamic lubrication is systematically investigated by using the partial derivative method, finite difference formulation and the finite element approach. The results indicate that, compared with rigid microbearing which has a constant viscosity gas lubricant, the temperature effect increases the load capacity, friction coefficient and stiffness coefficients, and it decreases the attitude angle and damping coefficients of the microbearing. The flexibility of the bearing pad also leads to the increase in load capacity and direct stiffness coefficients, while it remains to further decrease the direct damping coefficients on the basis of thermo-aerodynamic performance. The present study is conducive to accurately analyze the microscopic flow properties in a microbearing-rotor system.

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Effect of misalignment on the dynamic characteristic of MEMS gas bearing considering rarefaction effect

Cited by 34 publications

References 30 publications

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Influence of Temperature Effect on the Static and Dynamic Performance of Gas-Lubricated Microbearings

Probabilistic Sensitivity Analysis of Wear Property for MEMS Gas Bearing

Thermo-Elasto-Hydrodynamic Characteristics Analysis of Journal Microbearing Lubricated with Rarefied Gas

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