2014
DOI: 10.1063/1.4871975
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Effect of Mg doping on the structural and free-charge carrier properties of InN films

Abstract: We present a comprehensive study of free-charge carrier and structural properties of two sets of InN films grown by molecular beam epitaxy and systematically doped with Mg from 1.0 Â 10 18 cm À3 to 3.9 Â 10 21 cm À3 . The free electron and hole concentration, mobility, and plasmon broadening parameters are determined by infrared spectroscopic ellipsometry. The lattice parameters, microstructure, and surface morphology are determined by high-resolution X-ray diffraction and atomic force microscopy. Consistent r… Show more

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Cited by 18 publications
(22 citation statements)
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“…β-Ga 2 O 3 possesses monoclinic crystal structure, and is highly anisotropic. In previous work, which included uniaxial and biaxial materials in single-layer and multiple-layer structures such as corundum [52], rutile [55], antimonite [56], pentacene [57,58], zinc metal oxides [59], wurtzite structure group-III nitride heterostructures [60][61][62][63][64][65][66][67][68][69][70], and form-induced anisotropic thin films [71], we discussed theory and applications of generalized ellipsometry in detail. In a number of recent publications we discussed the treatment and necessity of investigating off-axis cut surfaces from anisotropic crystals to gain access to all long-wavelength active phonon modes, for example in ZnO [72], and in wurtzite structure group-III nitrides [73][74][75].…”
Section: Generalized Ellipsometrymentioning
confidence: 99%
“…β-Ga 2 O 3 possesses monoclinic crystal structure, and is highly anisotropic. In previous work, which included uniaxial and biaxial materials in single-layer and multiple-layer structures such as corundum [52], rutile [55], antimonite [56], pentacene [57,58], zinc metal oxides [59], wurtzite structure group-III nitride heterostructures [60][61][62][63][64][65][66][67][68][69][70], and form-induced anisotropic thin films [71], we discussed theory and applications of generalized ellipsometry in detail. In a number of recent publications we discussed the treatment and necessity of investigating off-axis cut surfaces from anisotropic crystals to gain access to all long-wavelength active phonon modes, for example in ZnO [72], and in wurtzite structure group-III nitrides [73][74][75].…”
Section: Generalized Ellipsometrymentioning
confidence: 99%
“…The nature of the conductivity of the Mg-doped InN sample is very important because it is related to its structural characteristics. 31,32 Mg concentration, [Mg], that provides for p-type conductivity in InN has been demonstrated to be in the range 1.0 × 10 18 cm −3 [Mg] 2.9 × 10 19 cm −3 . 33 Mg-doped InN becomes n-type when [Mg] exceeds 2.9 × 10 19 cm −3 .…”
Section: Resultsmentioning
confidence: 99%
“…Like SFs, increasing [Mg] in InN was found to form zinc-blende InN and lattice strain, owing to the growth process and size effect, elucidated by X-ray diffraction (XRD) method. 32 Therefore, XRD measurements were made to characterize the films. (0002), and the GaN(0002) buffer layer were clearly observed.…”
Section: Resultsmentioning
confidence: 99%
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“…Generalized ellipsometry is a versatile concept 19,[44][45][46] for analysis of optical properties of generally anisotropic materials in bulk (e.g., rutile,, 41 stibnite, 43 ) as well as in multiple-layer stacks (e.g., pentacene films, 47 group-III nitride heterostructures, [48][49][50] and meta-materials [51][52][53] ). A multiple sample, multiple azimuth, and multiple angle of incidence approach is required for monoclinic CdWO 4 , following the same approach used previously for monoclinic β-Ga 2 O 3 .…”
Section: Generalized Ellipsometrymentioning
confidence: 99%