Effect of material structure on spinel machinability in its fixed abrasive lapping

Wang, Zhankui; Pang, Mingjun; Liang, Mingchao; Wang, Jianbin; Ma, Lianjie; Liu, Haixu; Han, Jianhai; Zhu, Yongwei; Su, Jianxiu

doi:10.1016/j.jmapro.2021.05.035

Cited by 11 publications

(2 citation statements)

References 30 publications

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“…Under the influence of the flow of the lapping slurry, the debris will form eddy currents between the FAP and the workpiece, and the abrasive grains will scratch the workpiece and matrix off the FAP under the drive of the eddy currents [30]. The shedding of worn particles and the appearance of fresh abrasive grains are promoted to achieve the self-repair of the FAP [31]. Therefore, the maximum value of the marginal spectrum is the largest (Figure 16c).…”

Section: Discussionmentioning

confidence: 99%

An Exploration of the Influence of Abrasive Water Jet Pressure on the Friction Signal Characteristics of Fixed Abrasive Lapping Quartz Glass Based on HHT

et al. 2023

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Abrasive water jetting is an effective dressing method for a fixed abrasive pad (FAP) and can improve FAP machining efficiency and the impact of abrasive water jet (AWJ) pressure on the dressing effect; moreover, the machining state of FAP after dressing has not been thoroughly studied. Therefore, in this study, the FAP was dressed by using AWJ under four pressures, and the dressed FAP was subjected to lapping experiments and tribological experiments. Through an analysis of the material removal rate, FAP surface topography, friction coefficient, and friction characteristic signal, the influence of AWJ pressure on the friction characteristic signal in FAP processing was studied. The outcomes show that the impact of the dressing on FAP rises and then falls as the AWJ pressure increases. The best dressing effect was observed when the AWJ pressure was 4 MPa. In addition, the maximum value of the marginal spectrum initially rises and then falls as the AWJ pressure increases. When the AWJ pressure was 4 MPa, the peak value of the marginal spectrum of the FAP that was dressed during processing was the largest.

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Section: Discussionmentioning

confidence: 99%

An Exploration of the Influence of Abrasive Water Jet Pressure on the Friction Signal Characteristics of Fixed Abrasive Lapping Quartz Glass Based on HHT

et al. 2023

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“…In addition, sapphire is chemically inert and hence does not react with acids at room temperature and is an excellent electrical insulator with high permittivity (Xu et al , 2018; Zhang et al , 2021). It is used in several fields such as the military, aerospace industry, biomedical industry and lighting-display field (Zhankui et al , 2021; Yu et al , 2021). The surface of sapphire wafers for light emitting diode ( LED) substrates should be ultra-smooth and damage-free (Uhlmann et al , 2018; Shi et al , 2018).…”

Section: Introductionmentioning

confidence: 99%

Surface quality prediction and lapping process optimisation on the fixed-abrasive lapping plate of sapphire wafers

Yan

Wang²,

Liu³

2022

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Purpose Lapping is a vital flattening process to improve the quality of processed semiconductor wafers such as single-crystal sapphire wafers. This study aims to optimise the lapping process of the fixed-abrasive lapping plate of sapphire wafers with good overall performance [i.e. high material removal rate (MRR), small surface roughness (Ra) of the wafers after lapping and small lapping plate wear ratio (η)]. Design/methodology/approach The influence of process parameters such as lapping time, abrasive size, abrasive concentration, lapping pressure and lapping speed on MRR, Ra and η of lapping-processed sapphire wafers was studied, and the results were combined with experimental data to establish a regression model. The multi-evaluation index optimisation problem was transformed into a single-index optimisation problem via an entropy method and the grey relational analysis (GRA) to comprehensively evaluate the performance of each parameter. Findings The results revealed that lapping time, abrasive size, abrasive concentration, lapping pressure and lapping speed had different influence degrees on MRR, Ra and η. Among these parameters, lapping time, lapping speed and abrasive size had the most significant effects on MRR, Ra and η, and the established regression equations predicted the response values of MRR, Ra and η to be 99.56%, 99.51% and 93.88% and the relative errors between the predicted and actual measured values were <12%, respectively. With increased lapping time, MRR, Ra and η gradually decreased. With increased abrasive size, MRR increased nearly linearly, whereas Ra and η initially decreased but subsequently increased. With an increase in abrasive concentration, MRR, Ra and η initially increased but subsequently decreased. With increased lapping pressure, MRR and η increased nearly linearly and continuously, whereas Ra decreased nearly linearly and continuously. With increased lapping speed, Ra initially decreased sharply but subsequently increased gradually, whereas η initially increased sharply but subsequently decreased gradually; however, the change in MRR was not significant. Comparing the optimised results obtained via the analysis of influence law, the parameters optimised via the entropy method and GRA were used to obtain sapphire wafers lapping with an MRR of 4.26 µm/min, Ra of 0.141 µm and η of 25.08, and the lapping effect was significantly improved. Originality/value Therefore, GRA can provide new ideas for ultra-precision processing and process optimisation of semiconductor materials such as sapphire wafers.

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Effect of particle size on friction signal characters when lapping quartz glass with fixed abrasive pad

Zhang

Zheng

Wang

et al. 2022

Int J Adv Manuf Technol

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Effect of material structure on spinel machinability in its fixed abrasive lapping

Cited by 11 publications

References 30 publications

An Exploration of the Influence of Abrasive Water Jet Pressure on the Friction Signal Characteristics of Fixed Abrasive Lapping Quartz Glass Based on HHT

An Exploration of the Influence of Abrasive Water Jet Pressure on the Friction Signal Characteristics of Fixed Abrasive Lapping Quartz Glass Based on HHT

Surface quality prediction and lapping process optimisation on the fixed-abrasive lapping plate of sapphire wafers

Effect of particle size on friction signal characters when lapping quartz glass with fixed abrasive pad

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