2022
DOI: 10.3390/coatings12020193
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Effect of Magnetron Sputtering Deposition Conditions on the Mechanical and Tribological Properties of Wear-Resistant Titanium Carbonitride Coatings

Abstract: In the present work, the titanium carbonitride coatings were deposited by the reactive magnetron sputtering method at different substrate bias: 0, −70 V, and −100 V. The effect of the substrate bias on the structure, composition, and mechanical and tribological properties of titanium carbonitride coatings was studied. Scanning electron microscopy, nanoindentation, sliding wear test (ball-on-disk method), X-ray phase, and elemental analysis methods were used to evaluate the tribological properties and microstru… Show more

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Cited by 12 publications
(18 citation statements)
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“…The coating deposited at 0 V was amorphous, while the coatings deposited when a bias voltage was applied to the substrate had a facecentered cubic structure with a predominant growth orientation (111). The results also show that TiCN coatings deposited at a substrate voltage of -70 V had a maximum hardness of 39 GPa and showed better wear resistance at a minimum WR and lower CoF of 0.13, this tendency showed also in [23].…”
Section: Research On Obtaining Titanium Carbonitride Coatingsmentioning
confidence: 59%
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“…The coating deposited at 0 V was amorphous, while the coatings deposited when a bias voltage was applied to the substrate had a facecentered cubic structure with a predominant growth orientation (111). The results also show that TiCN coatings deposited at a substrate voltage of -70 V had a maximum hardness of 39 GPa and showed better wear resistance at a minimum WR and lower CoF of 0.13, this tendency showed also in [23].…”
Section: Research On Obtaining Titanium Carbonitride Coatingsmentioning
confidence: 59%
“…Among the works studied, the relatively lowest coefficient of friction of the TiCN coating with low WR (~10 -6 mm 3 /Nm) was achieved in our experimental work [23]. Sample rotation speed, 1 cm/s; load, 1 N; wear track radius, 7 mm; friction path, 100 m; data collection speed: 50 Hz, a Si3N4 ball with a diameter of 6 mm was used as a counter body.…”
Section: Research On Obtaining Titanium Carbonitride Coatingsmentioning
confidence: 85%
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“…We photographed the surface of the coatings at 5× optical magnification using a metallographic microscope (Altami MET 5S model). We employed scanning electron microscopy (SEM) using backscattered electrons (BSE) at accelerated voltages of a JSM-6390LV (Jeol, Tokyo, Japan) scanning electron microscope to study the morphology of sample cross-section [16].…”
Section: Methodsmentioning
confidence: 99%