“…A typical deposition system includes a vacuum chamber, magnetron, cooling system, power supply, evacuation pumps, and other additional instrumentation for measurement. [17], [18], [19], [20], [21], [22], [23]] and radio frequency (RFMS) [ [15], [25], [26], [27]] under balanced and unbalanced magnetron operating conditions [ [28][29]]. The deposition process of TiCN hard coatings is directly influenced by parameters such as working atmosphere pressure, composition and ratio of reaction gases, current power supplied to the magnetron, bias potential and substrate temperature, target composition, and more.…”