2004
DOI: 10.1016/j.apsusc.2003.10.045
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Effect of magnetic field on the growth of α-Fe2O3 thin films by atomic layer deposition

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Cited by 55 publications
(42 citation statements)
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“…In selected cases, an Al 2 O 3 ALD technique was used to deposit an additional catalytic support layer. The Al 2 O 3 ALD used three ALD cycles comprised of alternating exposures to trimethyl aluminum and water vapors to deposit *0.4 nm of Al 2 O 3 [25][26][27]. Finally, the Co 3 O 4 ALD coating was performed using 5-20 ALD cycles comprised of alternating exposures to bis(cyclopentadienyl)cobalt (II) and ozone.…”
Section: Catalyst Preparationmentioning
confidence: 99%
“…In selected cases, an Al 2 O 3 ALD technique was used to deposit an additional catalytic support layer. The Al 2 O 3 ALD used three ALD cycles comprised of alternating exposures to trimethyl aluminum and water vapors to deposit *0.4 nm of Al 2 O 3 [25][26][27]. Finally, the Co 3 O 4 ALD coating was performed using 5-20 ALD cycles comprised of alternating exposures to bis(cyclopentadienyl)cobalt (II) and ozone.…”
Section: Catalyst Preparationmentioning
confidence: 99%
“…A variety of different methods has been used to deposit iron oxide thin films, e.g., sputtering, [4] sol-gel, [5] aqueous chemical growth, [3] molecular beam epitaxy (MBE), [8] CVD, [9,10] and ALD. [11][12][13][14] There are also numerous reports of nanostructured iron oxide. [3,[15][16][17][18] Despite all reports of nanostructured materials, it is inherently difficult to fabricate arrays in a well-ordered pattern.…”
Section: Introductionmentioning
confidence: 99%
“…In this case, the ferromagnetic hematite has been considered an important potential material for technological uses, primarily as thin film sensors and photoelectrodes [10][11][12][13][14].…”
mentioning
confidence: 99%