“…The flow rate of the oxygen is controlled by a mass-flowcontroller (1). The pressure inside the crucible is controlled by the pressure gauge (4). During the process the autoclave is continuously connected to the running pump system, i.e.…”
Section: Set-up and Procedures For The Growth Experiments With Oxygen Dmentioning
confidence: 99%
“…It is reported in the literature [4] that oxygen in CaF 2 leads to the formation of color centers which strongly reduce the transmission in the DUV region as well as the radiation hardness. Despite the high importance of the oxygen for the application of CaF 2 in the photolithography, its influence on the optical properties is not sufficiently investigated to date.…”
“…The flow rate of the oxygen is controlled by a mass-flowcontroller (1). The pressure inside the crucible is controlled by the pressure gauge (4). During the process the autoclave is continuously connected to the running pump system, i.e.…”
Section: Set-up and Procedures For The Growth Experiments With Oxygen Dmentioning
confidence: 99%
“…It is reported in the literature [4] that oxygen in CaF 2 leads to the formation of color centers which strongly reduce the transmission in the DUV region as well as the radiation hardness. Despite the high importance of the oxygen for the application of CaF 2 in the photolithography, its influence on the optical properties is not sufficiently investigated to date.…”
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