2014
DOI: 10.1134/s1027451013060098
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Effect of ion bombardment on the phase composition and mechanical properties of diamond-like carbon films

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Cited by 12 publications
(4 citation statements)
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“…The formation of sp 2 /sp 3 binding hybridization is related to the local density produced by ion bombardment at various conditions. Many researchers have confirmed that ion bombardment at low energies (tens and hundreds of eV) induces the formation of sp 3 "diamond bonds" [39][40][41].…”
Section: Raman Spectroscopymentioning
confidence: 99%
“…The formation of sp 2 /sp 3 binding hybridization is related to the local density produced by ion bombardment at various conditions. Many researchers have confirmed that ion bombardment at low energies (tens and hundreds of eV) induces the formation of sp 3 "diamond bonds" [39][40][41].…”
Section: Raman Spectroscopymentioning
confidence: 99%
“…However, in the technology of film deposition, it is important to be able to control and diagnose the materials obtained. Among the methods frequently used for this purpose are: low-energy electron diffraction, Auger electron spectroscopy, X-ray photoelectron spectroscopy and others [10,11].…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays, processes using RF plasma are applied in various fields of science and technology [1][2][3][4][5]. It widely used in the technology of obtaining materials in the form of thin and thick films [1], powders, composites [2; 4], as well as for various kinds of surface treatment [6][7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays, processes using RF plasma are applied in various fields of science and technology [1][2][3][4][5]. It widely used in the technology of obtaining materials in the form of thin and thick films [1], powders, composites [2; 4], as well as for various kinds of surface treatment [6][7][8][9][10][11][12]. Depending on the task, RF plasma installations are created which differ in an excitations source [13; 14], pressure requirements [14; 15], as well as the composition of gas mixtures [5; 6; 9].…”
Section: Introductionmentioning
confidence: 99%