Effect of interlayer thickness on electrochemical properties and corrosion resistance of sputtered TiNxnm/Tixnm multilayer thin films

Jena, Sanketa; Gupta, Mukul; Swain, Bibhu P.

doi:10.1016/j.mssp.2024.108729

Materials Science in Semiconductor Processing

2024

DOI: 10.1016/j.mssp.2024.108729

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Effect of interlayer thickness on electrochemical properties and corrosion resistance of sputtered TiNxnm/Tixnm multilayer thin films

Sanketa Jena,

Mukul Gupta,

Bibhu P. Swain

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Effect of interlayer thickness on electrochemical properties and corrosion resistance of sputtered TiNxnm/Tixnm multilayer thin films

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References 51 publications

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