2019
DOI: 10.1063/1.5093586
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Effect of implantation of Sm+ ions into RF sputtered ZnO thin film

Abstract: The effects of implantation of Samarium ions (Sm+), a rare earth ion (RE) on the properties of ZnO films grown on Si (001) substrate by RF sputtering system are presented. The structural properties of the virgin and Sm–implanted ZnO thin films were investigated by Atomic force microscopy, Rutherford backscattering spectroscopy and Raman spectroscopy. Local lattice softening caused by the incorporation of highly mismatched Sm+ (ionic radii 0.096 nm and 0.113 nm for Sm3+ and Sm2+ respectively) into Zn antisites … Show more

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Cited by 10 publications
(2 citation statements)
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“…The average root mean square (RMS) roughness of the pristine film is 2.10 nm and for Fe 1E14 , it is found at 2.71 nm. This roughness increment is attributed to the formation of microvoid structure at lower fluence [38]. With a further increase in fluence, the RMS roughness value decreases up to 0.44 nm.…”
Section: Morphological Studiesmentioning
confidence: 88%
“…The average root mean square (RMS) roughness of the pristine film is 2.10 nm and for Fe 1E14 , it is found at 2.71 nm. This roughness increment is attributed to the formation of microvoid structure at lower fluence [38]. With a further increase in fluence, the RMS roughness value decreases up to 0.44 nm.…”
Section: Morphological Studiesmentioning
confidence: 88%
“…In addition to defect-mediated luminescence, highly luminescent rare-earth elements such as Sm, Tb, and Gd can successfully be implanted in ZnO nanostructured films to make them excellent and efficient luminescent material. Figure a shows the digital photographs showing excellent visible luminescence from unimplanted and Gd-implanted ZnO thin films followed by annealing in a vacuum at 750 °C, while Figure b represents the corresponding PL spectrum …”
Section: Properties Of Implanted Znomentioning
confidence: 99%