Effect of Helium Gas Pressure on X-Ray Mask Heating during Synchrotron Radiation Exposure

Chiba, Akira; Futagami, Motonobu; Okada, Koichi; Kato, T.; Atoda, Nobufumi

doi:10.1143/jjap.34.75

Cited by 4 publications

(1 citation statement)

References 6 publications

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“…Beryllium windows were used for vacuum separation, and were surrounded by helium gas to prevent window oxidation. The chamber was also filled with helium gas to minimize the photon flux degradation and maintain a high X-ray transmission [14]. In addition, this gas gives an efficient convection of heat generation due to its non-zero heat capacity [4].…”

Section: Methodsmentioning

confidence: 99%

Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography

et al. 2019

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In this study, a fabrication method of tapered microstructures with high aspect ratio was proposed by deep X-ray lithography. Tapered microstructures with several hundred micrometers and high aspect ratio are demanded owing to the high applicability in the fields of various microelectromechanical systems (MEMS) such as optical components and microfluidic channels. However, as the pattern and gap size were downsized to smaller micro-scale with higher aspect ratio over 5, microstructures were easily deformed or clustered together due to capillary force during the drying process. Here, we describe a novel manufacturing process of tapered microstructures with high aspect ratio. To selectively block the deep X-ray irradiation, an X-ray mask was prepared via conventional ultraviolet (UV) lithography. A double X-ray exposure process with and without X-ray mask was applied to impose a two-step dose distribution on a photoresist. For the clear removal of the exposed region, the product was developed in the downward direction, which encourages a gravity-induced pulling force as well as a convective transport of the developer. After a drying process with the surface additive, tapered microstructures were successfully fabricated with a pattern size of 130 μm, gap size of 40 μm, and aspect ratio over 7.

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Section: Methodsmentioning

confidence: 99%

Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography

et al. 2019

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The impact of deep levels on the photocurrent transients in semi-insulating GaAs

Pavlović

Šantić

Desnica-Frankovic

et al. 2003

Journal of Elec Materi

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The photocurrent transients, I PC (t), were studied in semi-insulating (SI) GaAs during a low-temperature (low-T) illumination. Unusual transients were explained by the model, relating I PC (t) to the deep levels/traps and their occupancy. Such traps were actually detected and characterized by the independent measurements of the thermally stimulated currents (TSCs). The processes of the generation, recombination, and capture were described by a set of coupled differential equations and solved numerically. The I PC (t), calculated without any free parameter, well reproduced (through eight orders of magnitude) the experimental transients over a wide range of the photon energies and intensities. The best-fit parameters agreed well with those determined from the TSC measurements.

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Measurement of Temperature Rise of Quartz Plate during Synchrotron Radiation Irradiation Using Infrared Camera

Chiba¹,

Oizumi²,

Yamanashi³

et al. 2002

Jpn. J. Appl. Phys.

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Temperature-dependent resistivities in the ab-plane and c-axis of Tl-based cuprates have been measured. Unlike the ab-plane properties, which are metallic, c-axis transport is semiconductor-like in the normal state for Tl 2 Ba 2 Ca 2 Cu 3 O x (Tl-2223) and Tl 2 Ba 2 CaCu 2 O x (Tl-2212). In contrast, for Tl 2 Ba 2 CuO x (Tl-2201), transport is metal-like in both the in-plane and the caxis. For multi-layered cuprates, transport properties along the c-axis could be described by a tunnelling model, whereas for single-layered compound Tl-2201 it would be easier for the out-of-plane transport behaviour to be coherent since the there are no insulating Ca layers in its structure. Moreover, combining the studies on Bi-2201, which has an insulating behaviour for the out-of-plane resistivity, we suggest that the Tl-O layers in Tl-based superconductors could be conducting, unlike the weakly correlated Bi-O layers in Bi-based cuprates.

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Effect of Helium Gas Pressure on X-Ray Mask Heating during Synchrotron Radiation Exposure

Cited by 4 publications

References 6 publications

Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography

Fabrication of Tapered Micropillars with High Aspect-Ratio Based on Deep X-ray Lithography

The impact of deep levels on the photocurrent transients in semi-insulating GaAs

Measurement of Temperature Rise of Quartz Plate during Synchrotron Radiation Irradiation Using Infrared Camera

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