2008
DOI: 10.1016/j.apsusc.2008.03.170
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Effect of H2 and O2 plasma etching treatment on the surface of diamond-like carbon thin film

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Cited by 70 publications
(48 citation statements)
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“…Recent studies have reported that modified DLC films improved biocompatibility, lubricity, stability, and cell adhesion [4][5][6][7][8]. According to Yun et al [4], these characteristics are related to structural bonds [9,10], surface roughness [11,12], and whether the film is hydrophobic or hydrophilic [13,14].…”
Section: Introductionmentioning
confidence: 99%
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“…Recent studies have reported that modified DLC films improved biocompatibility, lubricity, stability, and cell adhesion [4][5][6][7][8]. According to Yun et al [4], these characteristics are related to structural bonds [9,10], surface roughness [11,12], and whether the film is hydrophobic or hydrophilic [13,14].…”
Section: Introductionmentioning
confidence: 99%
“…DLC consist of dense amorphous carbon or hydrocarbon, and their mechanical properties fall between those of graphite and diamond [1][2][3][4]. Due to their mechanical, electrical, optical, and chemical properties, the use of DLC coatings in mechanical and electrical fields has increased with recent applications in food, beverage, and medical markets [3].…”
Section: Introductionmentioning
confidence: 99%
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“…Hydrogen atomic radicals can be formed in discharge which leads to more effective reactive etching. Etching by hydrogen plasma causes incorporation of H and reduction of dangling bonds, unlike oxygen plasma which increases the number of dangling bonds [63]. It was observed that sputtering of the surface with a combination of hydrogen atoms and argon ion enhances sputtering more than their sum.…”
Section: Reactive Etching/plasma Treatment By Gases Containing Hydrogenmentioning
confidence: 90%
“…Therefore, it was possible to obtain the hydrophilic property for PCL films by oxygen plasma etching. This means that the high concentration of carbon-oxygen sites on the surface of PCL films by oxygen plasma etching contributed to the adsorption hysteresis related to the high surface energy 47) . The AFM observation showed that a random textured structure composed of pits, grooves, and protrusions was formed on all layer surfaces of 3D PCL scaffolds.…”
Section: Discussionmentioning
confidence: 99%