Effect of gas type and flow rate on Cu free air ball formation in thermosonic wire bonding

Pequegnat, A.; Kim, H. J.; Mayer, Michael; Zhou, Yunhong; Persic, John; Moon, J.T.

doi:10.1016/j.microrel.2010.02.023

Cited by 22 publications

(8 citation statements)

References 14 publications

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“…According to Figs. 4a and 4b, using shielding gas for Au wire results in increasing hatched area that indicates mis-shaped FABs [7]. For the case of Cu wire in forming gas (Fig.…”

Section: Effect Of Gas Flow Rates and Typesmentioning

confidence: 93%

“…For each wire, EFO parameters are set to obtain a target FAB diameter of ≈40 µm. A previously reported method is used for investigating and comparing deformability [4][5][6][7] using an Esec 3100 wirebonder with custom software options. For the controlled deformation, the nominal forces range from 100 to 900 mN.…”

Section: Methodsmentioning

confidence: 99%

“…The same method as in [7] is used to obtain deformability-flow rate plots as shown in Figs. 4a to 4f.…”

Section: Effect Of Gas Flow Rates and Typesmentioning

confidence: 99%

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Free-air ball formation and deformability with Pd coated Cu wire

Rezvani

Mayer

Shah

et al. 2011

2011 IEEE 61st Electronic Components and Technology Conference (ECTC)

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With 20 µm diameter PCC wire, spherical (well-shaped) free-air balls (FABs) were obtained in both forming gas and N 2 at flow rates between 0.25-0.75 l/min and 0.4-0.5 l/min, respectively. With Cu wire, in comparison, sperical FAB are obtained in forming gas with flow rates between 0.25 and 0.5 l/min while in N 2 gas, FABs are always pointed or golf-clubbed (mis-shaped). Using a shielding gas with Au wire makes the FABs mis-shaped.The FAB deformability is measured as the amount of deformation under a given load. Au had the highest deformability. The FABs made with PCC wire in N 2 had generally the same deformability as Cu FABs in forming gas. The force required to achieve a pre-defined deformed ball height (target) is named "force for target deformation", F TD , and set to half the FAB diameter. Compared to "deformability", the F TD method is more similar to the standard tensile or compression tests that determine yield strength. Deforming a PCC FAB obtained with 0.4 l/min N 2 to the target ball height requires 615 ± 32 mN, a value not significantly different from that for a Cu FAB obtained in 5 l/min forming gas. For comparison, the target deformation requires 394 ± 16 mN for a Au FAB.

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“…According to Figs. 4a and 4b, using shielding gas for Au wire results in increasing hatched area that indicates mis-shaped FABs [7]. For the case of Cu wire in forming gas (Fig.…”

Section: Effect Of Gas Flow Rates and Typesmentioning

confidence: 93%

Section: Methodsmentioning

confidence: 99%

See 1 more Smart Citation

Free-air ball formation and deformability with Pd coated Cu wire

Rezvani

Mayer

Shah

et al. 2011

2011 IEEE 61st Electronic Components and Technology Conference (ECTC)

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“…These nonsymmetrical ball bonds are originated from Cu FAB with "golfclubbed" shape. The formation of this defective FAB is explained by Cu oxidation during EFO process that results in distortion of surface tension of molten Cu [13]. Fig.…”

Section: Resultsmentioning

confidence: 96%

Oxidation study on as-bonded intermetallic of copper wire–aluminum bond pad metallization for electronic microchip

Anand

Yau

Huat³

2012

Materials Chemistry and Physics

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“…Impedance control strategy can be used to indirectly regulate the force using a single controller through establishing the dynamic relation between the force and position or velocity. However, the environmental conditions of wire clamps for thermosonic wire bonding are not always certain, which makes it difficult to accurately control the force using the indirectly control approach [12,13] . Through hybrid position/force control scheme, the grasping and releasing operations can be implemented by controlling the position of the clamp jaws and monitoring the contact forces at the same time, but the control performance largely depends on the division of force and position subspaces, which requires to accurately identify the environmental constrains [14] .…”

Section: Introductionmentioning

confidence: 99%

Development of a high speed and precision wire clamp with both position and force regulations

Liang

Wang

Tian

et al. 2017

Robotics and Computer-Integrated Manufacturing

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Development of a high speed and precision wire clamp with both position and force regulations. . Permanent WRAP URL:http://wrap.warwick.ac.uk/94028 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for-profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way.

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Effect of gas type and flow rate on Cu free air ball formation in thermosonic wire bonding

Cited by 22 publications

References 14 publications

Free-air ball formation and deformability with Pd coated Cu wire

Free-air ball formation and deformability with Pd coated Cu wire

Oxidation study on as-bonded intermetallic of copper wire–aluminum bond pad metallization for electronic microchip

Development of a high speed and precision wire clamp with both position and force regulations

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