Effect of gas flow on the nanoparticles transport in dusty acetylene plasmas

Abstract

This article presents simulation results on the effects of neutral gas flow for nanoparticle transport in atmospheric-pressure, radio-frequency (RF), capacitively-coupled, and acetylene discharge. The acetylene gas is set to flow into the chamber from the upper showerhead electrode. The internal energy of the gas medium therein is transferred into kinetic energy so the gas advection can be triggered. This is represented by the pressure volume work term of the gas energy converse equation. The gas advection leads to the gas temperature sink at the gas inlet, hence a large gas temperature gradient is formed. The thermophoresis relies on the gas temperature gradient, and causes the profile of nanoparticle density to vary from a double-peak structure to a single-peak one. The gas advection influences the properties of electron density and temperature as well and causes the DA mode profile of electron density asymmetric. In the bulk region, i.e., away from the inlet, the gas advection is more like one isovolumetric compression, which slightly increases the temperature of the gas medium at consuming its kinetic energy.

Impedance matching design of capacitively coupled plasma with fluid and external circuit coupled model

“…Plasma simulation methods mainly include global models, [10][11][12] fluid models, [13][14][15][16] particle-in-cell (PIC) models, [17,18] as well as hybrid models. [19,20] In practical applications, the choice of method depends on the characteristics of the research subject and computational costs.…”

“…Zhang et al [26] utilized a 2D fluid model in conjunction with the complete set of Maxwell equations, known as Multiphysics Analysis for Plasma Sources, to offer a more thorough depiction of plasma characteristics within an electrically asymmetric CCP excited by multiple harmonics. Liu et al [14] formulated a 2D multifluid model to explore the influence of gas flow on the transport of nanoparticles in dusty acetylene plasmas. However, many fluid simulations have not taken into account the influence of external circuits.…”