Effect of gas composition on metal surface cleaning using atmospheric pressure microwave plasma

High Speed Hydrophilic Treatment of Polyimide Surfaces using an Atmospheric Pressure Microwave Oxygen-Argon Plasma

“…Atmospheric pressure microwave plasma source (10) In the apparatus used in this study, microwave power (2.45 GHz) was supplied to a discharge tube through a rectangular waveguide, and a schematic diagram of the plasma source is shown in Figure 1. The plasma source consisted of a tapered waveguide that concentrated microwave power into a small volume of a quartz discharge tube with a 10 cm outer diameter.…”

“…The oxygen radical density profile was calculated by a one-dimensional numerical model using the measured electron temperatures and densities in the O 2 -Ar plasma (10) (16,17,18). The negative oxygen ion was neglected because of the high gas temperatures, since these tend to generate a very low negative ion density.…”

“…However, it is important to determine which conditions are most effective in terms of modifying various properties of the polymer. Previous studies have reported that collisions of oxygen atoms with the polyimide surface may be very important in the downstream plasma region (9,10). As a result, the work reported herein was designed to allow an improved understanding of the hydrophilic modification process through measurement of the spatial distribution of the absolute oxygen atom number density, using a heated catalytic probe, and measurements of various other plasma parameters in an atmospheric pressure microwave-excited O 2 -Ar gas plasma.…”

Reduction and Sintering of Copper Nano-Particles by Non-Equilibrium Atmospheric Pressure Plasma Jet

“…In recent years, atmospheric pressure plasma has become a very popular tool in various fields [28][29][30][31][32][33][34][35][36], especially surface treatment as shown in Fig. 1.5.…”

Effect of Dielectric in a Plasma Annealing System at Atmospheric Pressure

“…However, this method has some drawbacks: low efficiency due to the division of the annealing and cleaning processes and environmentally harmful because of using chemical to clean thin wire, for example, Tri-chloethane, it is hazardous to human body and has ozone layer effect. The new annealing system in which the annealing and cleaning processes are simultaneously operated in Atmospheric Pressure DielectricBarrier Discharge (APDBD) [5][6][7][8][9] is the potential solution for these drawbacks. In previous studied, it is shown that wire annealing [10,11] and cleaning [12] using APDBD is totally possible.…”