EFFECT OF Ce-DOPING ON STRUCTURAL AND ELECTRICAL PROPERTIES OF DIELECTRIC Bi₂Ti₂O₇ THIN FILMS

Abstract

Ce-doped Bi 2 Ti 2 O 7 thin films have been successfully prepared on P-type Si substrates by a chemical solution deposition method. The structural properties of the films were studied by X-ray diffraction. The phase of Ce-doped Bi 2 Ti 2 O 7 was more stable than that of Bi 2 Ti 2 O 7 without Ce substitution. The films exhibited good insulating properties at room temperature. The dielectric constant of the films annealed at 700 • C at 100 kHz was 168 and the dissipation factor was 0.038. All these results showed that Ce-doped Bi 2 Ti 2 O 7 thin films could be used as storage capacitors in DRAM and MOS.