Effect of film thickness on humidity sensing of spray deposited TiO<sub>2</sub> thin films

Gapale, Dipak L; Arote, Sandeep A.; Palve, Balasaheb M.; Dalvi, Sanjaykumar; Borse, R. Y.

doi:10.1088/2053-1591/aae970

Cited by 11 publications

(3 citation statements)

References 43 publications

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“…No other impurity phases observed into the crystalline material, which confirmed that Fe 3+ ions are successfully amalgamated into the TiO 2 lattice structure without the formation of iron oxide on the TiO 2 surface [22] . This is because Fe 3+ ion has an ionic radius (0.64 Å) comparable to Ti 4+ (0.68 Å) and can also form octahedral coordination similar to Ti 4+ [23,24] .…”

Section: Xrd Analysismentioning

confidence: 99%

Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

Gapale¹,

Bardapurkar²,

Arote³

et al. 2021

J. Semicond.

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In the present work, ferrite (Fe) doped TiO2 thin films with different volume percentage (vol%) were synthesized using a spray pyrolysis technique. The effect of Fe doping on structural properties such as crystallite size, texture coefficient, microstrain, dislocation densities etc. were evaluated from the X ray diffratometry (XRD) data. XRD data revealed a polycrystalline anatase TiO2 phase for sample synthesized up to 2 vol% and mixed anatase and rutile crystalline phase for sample synthesized at 4 vol% Fe doped TiO2. The crystalline size was observed to decrease with increase in Fe dopant vol% and also other structural parameters changes with Fe dopant percentage. In the present work, electrical resistance was observed to decrease with a rise in Fe dopant vol% and temperature of the sample. Thermal properties like temperature coefficient of resistance and activation energy also showed strong correlation with Fe dopant vol%. Humidity sensing properties of the synthesized sample altered with a change in Fe dopant vol%. In the present paper, maximum sensitivity of about 88.7% for the sample synthesized with 2 vol% Fe doped TiO2 and also the lowest response and recovery time of about 52 and 3 s were reported for the same sample.

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Section: Xrd Analysismentioning

confidence: 99%

Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

Gapale¹,

Bardapurkar²,

Arote³

et al. 2021

J. Semicond.

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“…Based on the experimental procedure, the following parameters were used to solve Eq. 11: time t = 20 min, deposition temperature T = 350 • C, 400 • C, 450 • C, and corresponding activation energy E = 0.339 eV, 0.326 eV, and 0.313 eV, respectively [22]. The growth rate coefficient A l is same for all deposition temperature.…”

Section: Film Growthmentioning

confidence: 99%

Mathematical Modeling of Droplet Formation, Evaporation, and Film Growth to Study Crystallite Size and Film Thickness of Spray Pyrolysis Deposited TiO<sub>2</sub> Thin Films

Gapale

Arote

Borse³

2018

e-J. Surf. Sci. Nanotech.

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The pure TiO2 thin films were successfully deposited onto a glass substrate by using modified spray pyrolysis system. The TiO2 thin films were deposited at temperature 350 • C using Titanium trichloride precursor solutions of concentration 0.075 M, 0.1 M, and 0.125 M. Also, TiO2 thin films with precursor solutions of concentration 0.1 M were deposited at different deposition temperature 350 • C, 400 • C, and 450 • C. The prepared samples were further annealed at 500 • C for 2 h to improve crystallinity. The XRD study revealed that the deposited TiO2 thin films were polycrystalline and showed anatase phase with predominant (101) peak. The crystallite size calculated from XRD was found to increase with increase in precursor solution concentration. The mathematical model to calculate crystallite size and film thickness were developed and the predicted results were compared with experimental results. The experimentally calculated crystallite size and thickness was in good agreement with the predicted results. The details of mathematical model and calculations TiO2 thin films for were discussed in detail.

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“…Therefore, lots of research activities have been performed in an effort to this end. For example, different methods have been employed to fabricate porous/nanostructured sensing materials − or deposit thin films of sensing materials. − Another key factor affecting humidity performances is the composition. Great efforts have been devoted to exploring highly sensitive materials.…”

mentioning

confidence: 99%

TiO₂/(K,Na)NbO₃ Nanocomposite for Boosting Humidity-Sensing Performances

Xie

et al. 2020

ACS Sens.

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Nanomaterials of TiO 2 , (K 0.5 Na 0.5 )NbO 3 , and the TiO 2 / (K 0.5 Na 0.5 )NbO 3 nanocomposite were successfully synthesized by a hydrothermal method. Impedance-type humidity sensors were fabricated based on these materials. Our results reveal that the impedance of the TiO 2 /(K 0.5 Na 0.5 )NbO 3 sensor changes by 5 orders of magnitude with an ultrahigh sensing response of S f = 166 470 recorded at 100 Hz in the tested relative humidity (RH) range of 12− 94%. This value is almost 2 and 4 orders of magnitude larger than that of the (K 0.5 Na 0.5 )NbO 3 and TiO 2 sensors, respectively. Interestingly, satisfactory response/recovery time (25/38 s, within 5 min), very small hysteresis (<5%), excellent stability, and good repeatability were also achieved in the TiO 2 / (K 0.5 Na 0.5 )NbO 3 sensor. The improved sensing properties are ascribed to the synergistic effect of TiO 2 /(K 0.5 Na 0.5 )NbO 3 heterojunction, which contributes the impedance that is susceptible to environmental humidity. This work underscores that it is a facile way to boost humidity-sensing performance by constructing proper nanocomposites.

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Effect of film thickness on humidity sensing of spray deposited TiO₂ thin films

Cited by 11 publications

References 43 publications

Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

Mathematical Modeling of Droplet Formation, Evaporation, and Film Growth to Study Crystallite Size and Film Thickness of Spray Pyrolysis Deposited TiO<sub>2</sub> Thin Films

TiO₂/(K,Na)NbO₃ Nanocomposite for Boosting Humidity-Sensing Performances

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Effect of film thickness on humidity sensing of spray deposited TiO2 thin films

Cited by 11 publications

References 43 publications

Humidity sensing properties of spray deposited Fe doped TiO2 thin film

Humidity sensing properties of spray deposited Fe doped TiO2 thin film

Mathematical Modeling of Droplet Formation, Evaporation, and Film Growth to Study Crystallite Size and Film Thickness of Spray Pyrolysis Deposited TiO<sub>2</sub> Thin Films

TiO2/(K,Na)NbO3 Nanocomposite for Boosting Humidity-Sensing Performances

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Product

Resources

About

Effect of film thickness on humidity sensing of spray deposited TiO₂ thin films

Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

Humidity sensing properties of spray deposited Fe doped TiO₂ thin film

TiO₂/(K,Na)NbO₃ Nanocomposite for Boosting Humidity-Sensing Performances