We have performed a detailed study of thermal annealing of the moment configuration in artificial spin ice. Permalloy (Ni 80 Fe 20 ) artificial spin ice samples were examined in the prototypical square ice geometry, studying annealing as a function of island thickness, island shape, and annealing temperature and duration. We also measured the Curie temperature as a function of film thickness, finding that thickness has a strong effect on the Curie temperature in regimes of relevance to many studies of the dynamics of artificial spin ice systems. Increasing the interaction energy between island moments and reducing the energy barrier to flipping the island moments allows the system to more closely approach the collective low energy state of the moments upon annealing, suggesting new channels for understanding the thermalization processes in these important model systems.Artificial spin ice systems are two-dimensional arrays of nanoscale elements, typically composed of single domain ferromagnetic islands 1 . These systems have been the subject of extensive study and have provided models for the study of a range of novel collective behaviors 2 . Certain artificial spin ice geometries have well-defined collective magnetic ground states, such as the square lattice 1 , while others have intrinsically disordered and complex ground states, such as the Shakti lattice 3-5 . These low-energy collective states have sparked considerable interest in attempting to realize the lowest energy state of different artificial spin ice lattices 6-10 . One successful approach to collective energy minimization involves annealing the arrays by heating them to temperatures near or above the Curie temperature (T C ) of the ferromagnetic material 11,12 . Upon cooling, the island moments arrange themselves into a low energy state via magnetostatic interactions. Using this method, both long-range-ordered 11-13 and intrinsically disordered ground states 4,14 have been achieved, both in permalloy (Ni 80 Fe 20 ) and in other alloys 9,10 . Notably, the method works well even for geometries known to exhibit slow relaxation toward the low energy state 4 . Given the high T C of permalloy, and its importance as a model material for these systems, we investigated thermal annealing of permalloy artificial spin ice by varying the annealing conditions and the geometry of the islands, with the goal of understanding how to improve the effectiveness of annealing.We fabricated our artificial square spin ice samples on Si wafers coated with a 200-nm-thick layer of Si-N deposited a) Electronic mail: peter.schiffer@yale.edu by low pressure chemical vapor deposition. The nanoislands, with varied lateral dimensions and inter-island gaps indicated below, were produced by electron beam lithography and liftoff as described previously 12 . The total area of all nanoislands in each square ice sample was about 200×200 µm 2 . In order to keep uniformity of all nanoislands, the write field for lithography was set to cover the whole sample. We deposited our samples with va...