Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
DOI: 10.1109/imnc.2003.1268533
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Effect of EUV light scattering from the rough absorber and buffer side wall

Yeong-Keun Kwon
1
,
Jun-Taek Park
2
,
Jong-Hoi Kim
3
et al.
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