Effect of Environmental Conditions on Quality Factors of MEMS Cantilever Beam Resonator in Gas Rarefaction

Phan, Minh Truong; Trinh, Xuan Thang; Le, Quoc Cuong; Ngo, Vo Ke Thanh; Nguyen, Cuu Khoa

doi:10.1007/s11220-020-00329-9

Cited by 8 publications

(3 citation statements)

References 49 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Due to several important applications, another significant area of research is the analysis of quality factors of micro-beam resonators in a wide range of gas rarefaction conditions. Such impactful studies have been performed in details, as can be found from the works of Nguyen and Li [29], Le et al [30], Phan et al [31], and Nguyen et al [32]. To date, no studies regarding the TED and FS of different types of micro-scale beams composed of PEMT composites have been undertaken-this motivated us to undertake the present work keeping various potential scientific and engineering applications in mind.…”

Section: Introductionmentioning

confidence: 99%

“…Now, by differentiating twice the expression of M T 0 given in equation (28) w.r.t. x and using the expression given in equation (31) we get…”

mentioning

confidence: 99%

“…This, in turn, makes the designing of high Q-factor MEMS resonators quite challenging. Following the eigenvalue approach as has been demonstrated in the works of Le et al [30], Nguyen and Li [84], and Phan et al [31], one can derive the expression of Q SFD 1 -, if required.…”

mentioning

confidence: 99%

See 2 more Smart Citations

Thermoelastic damping and frequency shift of different micro-scale piezoelectro-magneto-thermoelastic beams

Guha,

Singh,

Singh

2023

Phys. Scr.

View full text Add to dashboard Cite

This work focuses on mathematically studying thermoelastic damping (TED) and frequency shift (FS) in micro-scale piezoelectro-magneto-thermoelastic (PEMT) composite beams composed of BaTiO3-CoFe2O4 combination. Pertaining to cutting-edge micro-technologies implemented in several engineering/scientific applications now-a-days, micro-scale doubly clamped (CC), doubly simply supported (SS), clamped-free (CF), and clamped-simply supported (CS) beams are extensively analyzed. The beams are modeled following the linear Euler–Bernoulli assumptions. The first two eigenvalues of all beams are numerically obtained using Newton-Raphson method. The closed-form expressions of TED and FS of all beams are derived analytically. The influences of Classical dynamical coupled (CL), Lord-Shulman (LS) & Green-Lindsay (GL) thermoelasticity theories, beam dimensions, BaTiO3 volume fraction (Ωf), and the first two modes M1 & M2) on the TED & FS are meticulously analyzed. Critical thickness (CrTh), critical length (CrLt), and TED (inverse Quality factor) of the beams are numerically obtained and studied. Among other key outcomes, the existence of a critical value of Ωf is established in the range Ωf∈ [ [0.5, 0.55], at which, the TED and FS display a drastic change in their natures. The outcomes of the present analysis may find immense potential uses in the design and development of PEMT composite micro-beams, and their applications in several areas such as supporting/stiffening other micro/nanostructures, construction works, sensitive sensing applications, etc.

show abstract